Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

Helena Ronkainen (Corresponding Author), Jari Koskinen, Simo Varjus, Kenneth Holmberg

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Abstract

Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.
Original languageEnglish
Pages (from-to)150-160
Number of pages11
JournalSurface and Coatings Technology
Volume122
Issue number2-3
DOIs
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

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Design of experiments
mechanical properties
Plasmas
Mechanical properties
wear resistance
statistical analysis
Wear resistance
Statistical methods
trends
Amorphous carbon
Bias voltage
planning
hardness
low pressure
Hardness
Planning
carbon
electric potential
Experiments

Cite this

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title = "Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films",
abstract = "Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.",
author = "Helena Ronkainen and Jari Koskinen and Simo Varjus and Kenneth Holmberg",
note = "Project code: V7SU01406",
year = "1999",
doi = "10.1016/S0257-8972(99)00380-1",
language = "English",
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pages = "150--160",
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TY - JOUR

T1 - Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

AU - Ronkainen, Helena

AU - Koskinen, Jari

AU - Varjus, Simo

AU - Holmberg, Kenneth

N1 - Project code: V7SU01406

PY - 1999

Y1 - 1999

N2 - Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.

AB - Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.

U2 - 10.1016/S0257-8972(99)00380-1

DO - 10.1016/S0257-8972(99)00380-1

M3 - Article

VL - 122

SP - 150

EP - 160

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 2-3

ER -