Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

Helena Ronkainen; Jari Koskinen; Simo Varjus; Kenneth Holmberg

doi:10.1016/S0257-8972(99)00380-1

Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

Helena Ronkainen (Corresponding Author), Jari Koskinen, Simo Varjus, Kenneth Holmberg

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)

Abstract

Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.

Original language	English
Pages (from-to)	150-160
Number of pages	11
Journal	Surface and Coatings Technology
Volume	122
Issue number	2-3
DOIs	https://doi.org/10.1016/S0257-8972(99)00380-1
Publication status	Published - 1999
MoE publication type	A1 Journal article-refereed

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10.1016/S0257-8972(99)00380-1

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@article{a25d40287a724d56831e949e0d5aaed9,

title = "Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films",

abstract = "Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.",

author = "Helena Ronkainen and Jari Koskinen and Simo Varjus and Kenneth Holmberg",

note = "Project code: V7SU01406",

year = "1999",

doi = "10.1016/S0257-8972(99)00380-1",

language = "English",

volume = "122",

pages = "150--160",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier",

number = "2-3",

}

Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films. / Ronkainen, Helena (Corresponding Author); Koskinen, Jari; Varjus, Simo et al.

In: Surface and Coatings Technology, Vol. 122, No. 2-3, 1999, p. 150-160.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

AU - Ronkainen, Helena

AU - Koskinen, Jari

AU - Varjus, Simo

AU - Holmberg, Kenneth

N1 - Project code: V7SU01406

PY - 1999

Y1 - 1999

N2 - Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.

AB - Hydrogenated amorphous carbon (a-C:H) films were deposited by the r.f. plasma technique in order to study the effect of deposition parameters on the mechanical and tribological properties of the films. An experimental design method was used for planning the experiments, and statistical analysis and modelling to analyse the results. The high hardness of the film was found to have the highest correlation with the good wear resistance of the film. By using response surface modelling, some direct trends from the process parameters to tribological properties were found. The best wear resistance for the a-C:H films was found for low pressure (0.7–2.5 Pa) and intermediate bias voltage (−550 V) values. By using the experimental design, the number of deposition runs could be reduced, and the statistical analysis and modelling provided useful and precise information showing also the significance of the trends observed.

U2 - 10.1016/S0257-8972(99)00380-1

DO - 10.1016/S0257-8972(99)00380-1

M3 - Article

VL - 122

SP - 150

EP - 160

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 2-3

ER -

Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

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