INIS
substrates
100%
losses
100%
thin films
100%
investigations
100%
mhz range
100%
acoustics
100%
resonators
100%
q-value
55%
optimization
22%
removal
22%
performance
11%
comparative evaluations
11%
devices
11%
operation
11%
coupling
11%
shear
11%
radiations
11%
filters
11%
leakage
11%
sound waves
11%
aluminium nitrides
11%
Keyphrases
Acoustics
100%
Resonator
100%
Substrate Loss
100%
BAW Resonator
100%
Substrate Removal
40%
Performance Improvement
20%
Electrical Characterization
20%
Operation Mode
20%
Small Changes
20%
Reflector
20%
Bragg Reflector
20%
Film Bulk Acoustic Resonator
20%
Loss Mechanism
20%
Electromechanical Coupling Coefficient
20%
Without Substrate
20%
Acoustic Wave Filter
20%
Longitudinal Wave
20%
Radiation Loss
20%
AlN Resonator
20%
Acoustic Radiation
20%
Solidly Mounted Resonator
20%
Shear Wave
20%
Main Performances
20%
Engineering
Experimental Investigation
100%
Thin Films
100%
Resonator
100%
Performance Improvement
11%
Operation Mode
11%
Shear Wave
11%
Radiation Loss
11%
Bragg Cell
11%
Intended Operation
11%
Coupling Coefficient
11%
Longitudinal Wave
11%
Material Science
Resonator
100%
Thin Films
100%
Aluminum Nitride
11%
Electromechanical Coupling
11%