Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

Antti Jaakkola, J. Lamy, James Dekker, Tuomas Pensala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)

    Abstract

    We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.
    Original languageEnglish
    Title of host publication2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages410-414
    ISBN (Print)978-1-4244-6399-2
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication

    Fingerprint

    microelectromechanical systems
    resonators
    indication
    wafers
    low frequencies
    single crystals
    silicon
    thin films

    Cite this

    Jaakkola, A., Lamy, J., Dekker, J., & Pensala, T. (2010). Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. In 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010 (pp. 410-414). Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/FREQ.2010.5556299
    Jaakkola, Antti ; Lamy, J. ; Dekker, James ; Pensala, Tuomas. / Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010. pp. 410-414
    @inproceedings{0379d93b71474711b62aef31d35d6a03,
    title = "Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators",
    abstract = "We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.",
    author = "Antti Jaakkola and J. Lamy and James Dekker and Tuomas Pensala",
    year = "2010",
    doi = "10.1109/FREQ.2010.5556299",
    language = "English",
    isbn = "978-1-4244-6399-2",
    pages = "410--414",
    booktitle = "2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    address = "United States",

    }

    Jaakkola, A, Lamy, J, Dekker, J & Pensala, T 2010, Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. in 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. IEEE Institute of Electrical and Electronic Engineers , Piscataway, NJ, USA, pp. 410-414. https://doi.org/10.1109/FREQ.2010.5556299

    Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. / Jaakkola, Antti; Lamy, J.; Dekker, James; Pensala, Tuomas.

    2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010. p. 410-414.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

    AU - Jaakkola, Antti

    AU - Lamy, J.

    AU - Dekker, James

    AU - Pensala, Tuomas

    PY - 2010

    Y1 - 2010

    N2 - We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

    AB - We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

    U2 - 10.1109/FREQ.2010.5556299

    DO - 10.1109/FREQ.2010.5556299

    M3 - Conference article in proceedings

    SN - 978-1-4244-6399-2

    SP - 410

    EP - 414

    BT - 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010

    PB - IEEE Institute of Electrical and Electronic Engineers

    CY - Piscataway, NJ, USA

    ER -

    Jaakkola A, Lamy J, Dekker J, Pensala T. Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. In 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . 2010. p. 410-414 https://doi.org/10.1109/FREQ.2010.5556299