Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

Antti Jaakkola, J. Lamy, James Dekker, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)

Abstract

We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.
Original languageEnglish
Title of host publication2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages410-414
ISBN (Print)978-1-4244-6399-2
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication

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microelectromechanical systems
resonators
indication
wafers
low frequencies
single crystals
silicon
thin films

Cite this

Jaakkola, A., Lamy, J., Dekker, J., & Pensala, T. (2010). Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. In 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010 (pp. 410-414). Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/FREQ.2010.5556299
Jaakkola, Antti ; Lamy, J. ; Dekker, James ; Pensala, Tuomas. / Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010. pp. 410-414
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Jaakkola, A, Lamy, J, Dekker, J & Pensala, T 2010, Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. in 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. IEEE Institute of Electrical and Electronic Engineers , Piscataway, NJ, USA, pp. 410-414. https://doi.org/10.1109/FREQ.2010.5556299

Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. / Jaakkola, Antti; Lamy, J.; Dekker, James; Pensala, Tuomas.

2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2010. p. 410-414.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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N2 - We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

AB - We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

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DO - 10.1109/FREQ.2010.5556299

M3 - Conference article in proceedings

SN - 978-1-4244-6399-2

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BT - 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010

PB - IEEE Institute of Electrical and Electronic Engineers

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Jaakkola A, Lamy J, Dekker J, Pensala T. Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. In 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . 2010. p. 410-414 https://doi.org/10.1109/FREQ.2010.5556299