Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

Antti Jaakkola; J. Lamy; James Dekker; Tuomas Pensala

doi:10.1109/FREQ.2010.5556299

Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

Antti Jaakkola
, J. Lamy
, James Dekker
, Tuomas Pensala

Aalto University

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

6 Citations (Scopus)

Abstract

We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

Original language	English
Title of host publication	2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	410-414
ISBN (Print)	978-1-4244-6399-2
DOIs	https://doi.org/10.1109/FREQ.2010.5556299
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication

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10.1109/FREQ.2010.5556299

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Jaakkola, A., Lamy, J., Dekker, J., & Pensala, T. (2010). Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. In 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010 (pp. 410-414). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/FREQ.2010.5556299

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title = "Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators",

abstract = "We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf \textasciitilde{} 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.",

author = "Antti Jaakkola and J. Lamy and James Dekker and Tuomas Pensala",

year = "2010",

doi = "10.1109/FREQ.2010.5556299",

language = "English",

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booktitle = "2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010",

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address = "United States",

}

Jaakkola, A, Lamy, J, Dekker, J & Pensala, T 2010, Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. in 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. IEEE Institute of Electrical and Electronic Engineers, Piscataway, NJ, USA, pp. 410-414. https://doi.org/10.1109/FREQ.2010.5556299

Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators. / Jaakkola, Antti; Lamy, J.; Dekker, James et al.
2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers, 2010. p. 410-414.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

AU - Jaakkola, Antti

AU - Lamy, J.

AU - Dekker, James

AU - Pensala, Tuomas

PY - 2010

Y1 - 2010

N2 - We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

AB - We report results of a parametric study on a set of single-crystal-silicon plate resonators, whose lateral dimensions are varied so that the main resonance mode occurs at a range of f = 13...30 MHz. The resonator transduction is based on a piezoelectric AlN thin film. Measurements spanning >1000 devices and two wafers indicate that with certain device dimensions the square extensional resonance mode and a higher-order extensional mode are excited with a relatively low frequency scatter of Δf ~ 2 000 ppm (full range). Other resonance modes typically have a frequency scatter larger than 15 000 ppm, which we interpret to be an indication of their flexural character. Additionally, we observe a splitting of the main resonance mode branch at intermediate device dimensions.

U2 - 10.1109/FREQ.2010.5556299

DO - 10.1109/FREQ.2010.5556299

M3 - Conference article in proceedings

SN - 978-1-4244-6399-2

SP - 410

EP - 414

BT - 2010 IEEE International Frequency Control Symposium (FCS). Newport Beach, CA, USA, 1 - 4 June 2010

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway, NJ, USA

ER -

Experimental study of the effects of size variations on piezoelectrically transduced MEMS resonators

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