INIS
size
100%
variations
100%
resonance
100%
resonators
100%
devices
75%
dimensions
75%
range
50%
single crystals
25%
silicon
25%
thin films
25%
plates
25%
mhz range
25%
parametric analysis
25%
piezoelectricity
25%
aluminium nitrides
25%
Keyphrases
Size Effect
100%
Resonant Mode
100%
MEMS Resonator
100%
Size Variation
100%
Device Dimensions
50%
Main Resonance
50%
Silicon Plates
25%
Multicrystalline Silicon
25%
Resonator
25%
Wafer
25%
Extensional Mode
25%
Plate Resonator
25%
Lateral Dimension
25%
High-order
25%
AlN Thin Film
25%
Piezoelectric AlN
25%
Material Science
Microelectromechanical System
100%
Resonator
100%
Aluminum Nitride
33%
Piezoelectricity
33%
Silicon
33%
Thin Films
33%
Single Crystal
33%