Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

Kimmo Kokkonen (Corresponding Author), Tuomas Pensala, Johanna Meltaus, Matti Kaivola

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)

    Abstract

    A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.
    Original languageEnglish
    Article number173502
    JournalApplied Physics Letters
    Volume96
    Issue number17
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA1 Journal article-refereed

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    resonators
    acoustics
    thin films
    multimode resonators
    curves
    interferometers
    equivalent circuits
    diagrams
    lasers

    Cite this

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    title = "Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements",
    abstract = "A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.",
    author = "Kimmo Kokkonen and Tuomas Pensala and Johanna Meltaus and Matti Kaivola",
    year = "2010",
    doi = "10.1063/1.3299012",
    language = "English",
    volume = "96",
    journal = "Applied Physics Letters",
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    Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements. / Kokkonen, Kimmo (Corresponding Author); Pensala, Tuomas; Meltaus, Johanna; Kaivola, Matti.

    In: Applied Physics Letters, Vol. 96, No. 17, 173502, 2010.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

    AU - Kokkonen, Kimmo

    AU - Pensala, Tuomas

    AU - Meltaus, Johanna

    AU - Kaivola, Matti

    PY - 2010

    Y1 - 2010

    N2 - A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.

    AB - A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.

    U2 - 10.1063/1.3299012

    DO - 10.1063/1.3299012

    M3 - Article

    VL - 96

    JO - Applied Physics Letters

    JF - Applied Physics Letters

    SN - 0003-6951

    IS - 17

    M1 - 173502

    ER -