Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

Kimmo Kokkonen (Corresponding Author), Tuomas Pensala, Johanna Meltaus, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Abstract

A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.
Original languageEnglish
Article number173502
JournalApplied Physics Letters
Volume96
Issue number17
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

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resonators
acoustics
thin films
multimode resonators
curves
interferometers
equivalent circuits
diagrams
lasers

Cite this

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title = "Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements",
abstract = "A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.",
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Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements. / Kokkonen, Kimmo (Corresponding Author); Pensala, Tuomas; Meltaus, Johanna; Kaivola, Matti.

In: Applied Physics Letters, Vol. 96, No. 17, 173502, 2010.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

AU - Kokkonen, Kimmo

AU - Pensala, Tuomas

AU - Meltaus, Johanna

AU - Kaivola, Matti

PY - 2010

Y1 - 2010

N2 - A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.

AB - A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator. The electrical response of the resonator exhibits a strong thickness resonance onto which spurious modes, caused by lateral standing plate waves, are superposed. Optical interferometer measurements are used to extract dispersion curves of the laterally propagating waves responsible for the spurious responses. A discrete eigenmode spectrum due to the finite lateral dimensions of the resonator is observed. An equivalent circuit model for a multimode resonator is fitted to the mechanical resonator response extracted along a single curve in the dispersion diagram, and is used to determine properties, such as Q-values, of the individual lateral eigenmodes. Measured wave field images, extracted dispersion curves, and the eigenmode spectrum with the model fitting results are presented.

U2 - 10.1063/1.3299012

DO - 10.1063/1.3299012

M3 - Article

VL - 96

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 17

M1 - 173502

ER -