Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides

Terho Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph, M Campbell, Ari Kärkkäinen, Marianne Hiltunen, Tomi Haatainen, Juha Rantala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.
Original languageEnglish
Title of host publicationSol-Gel Optics VI
PublisherInternational Society for Optics and Photonics SPIE
Pages106-114
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication
EventOptical Science and Technology - Seattle, United States
Duration: 7 Jul 200211 Jul 2002

Publication series

SeriesProceedings of SPIE
Volume4804

Conference

ConferenceOptical Science and Technology
CountryUnited States
CitySeattle
Period7/07/0211/07/02

Fingerprint

Tin
Fabrication
Thin films
Ultraviolet lamps
Antimony
Conductive films
2-Propanol
Photopolymerization
Spin coating
Mercury
X ray photoelectron spectroscopy
Doping (additives)
Irradiation
Crystalline materials
methacrylic acid
Air

Cite this

Kololuoma, T., Tolonen, A., Johansson, L-S., Campbell, J. M., Kärkkäinen, A., Hiltunen, M., ... Rantala, J. (2002). Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides. In Sol-Gel Optics VI (pp. 106-114). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4804
Kololuoma, Terho ; Tolonen, Ari ; Johansson, Leena-Sisko ; Campbell, Joseph, M ; Kärkkäinen, Ari ; Hiltunen, Marianne ; Haatainen, Tomi ; Rantala, Juha. / Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides. Sol-Gel Optics VI. International Society for Optics and Photonics SPIE, 2002. pp. 106-114 (Proceedings of SPIE, Vol. 4804).
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title = "Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides",
abstract = "We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.",
author = "Terho Kololuoma and Ari Tolonen and Leena-Sisko Johansson and Campbell, {Joseph, M} and Ari K{\"a}rkk{\"a}inen and Marianne Hiltunen and Tomi Haatainen and Juha Rantala",
year = "2002",
language = "English",
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publisher = "International Society for Optics and Photonics SPIE",
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Kololuoma, T, Tolonen, A, Johansson, L-S, Campbell, JM, Kärkkäinen, A, Hiltunen, M, Haatainen, T & Rantala, J 2002, Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides. in Sol-Gel Optics VI. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 4804, pp. 106-114, Optical Science and Technology, Seattle, United States, 7/07/02.

Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides. / Kololuoma, Terho; Tolonen, Ari; Johansson, Leena-Sisko; Campbell, Joseph, M; Kärkkäinen, Ari; Hiltunen, Marianne; Haatainen, Tomi; Rantala, Juha.

Sol-Gel Optics VI. International Society for Optics and Photonics SPIE, 2002. p. 106-114 (Proceedings of SPIE, Vol. 4804).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides

AU - Kololuoma, Terho

AU - Tolonen, Ari

AU - Johansson, Leena-Sisko

AU - Campbell, Joseph, M

AU - Kärkkäinen, Ari

AU - Hiltunen, Marianne

AU - Haatainen, Tomi

AU - Rantala, Juha

PY - 2002

Y1 - 2002

N2 - We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.

AB - We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

SP - 106

EP - 114

BT - Sol-Gel Optics VI

PB - International Society for Optics and Photonics SPIE

ER -

Kololuoma T, Tolonen A, Johansson L-S, Campbell JM, Kärkkäinen A, Hiltunen M et al. Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides. In Sol-Gel Optics VI. International Society for Optics and Photonics SPIE. 2002. p. 106-114. (Proceedings of SPIE, Vol. 4804).