Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides

Terho Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph, M Campbell, Ari Kärkkäinen, Marianne Hiltunen, Tomi Haatainen, Juha Rantala

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.
Original languageEnglish
Title of host publicationSol-Gel Optics VI
PublisherInternational Society for Optics and Photonics SPIE
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication
EventOptical Science and Technology - Seattle, United States
Duration: 7 Jul 200211 Jul 2002

Publication series

SeriesProceedings of SPIE


ConferenceOptical Science and Technology
CountryUnited States

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