@inproceedings{2567b078a17244d4957d68592f15d615,
title = "Fabrication and characterization of Sb-doped SnO2 thin films derived from methacrylic acid modified tin(IV)alkoxides",
abstract = "We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.",
author = "Terho Kololuoma and Ari Tolonen and Leena-Sisko Johansson and Campbell, {Joseph, M} and Ari K{\"a}rkk{\"a}inen and Marianne Hiltunen and Tomi Haatainen and Juha Rantala",
year = "2002",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "106--114",
booktitle = "Sol-Gel Optics VI",
address = "United States",
note = "Optical Science and Technology ; Conference date: 07-07-2002 Through 11-07-2002",
}