Fabrication and characterization of waveguide structures on SOI

Timo Aalto, Päivi Heimala, Sanna Yliniemi, Markku Kapulainen, Matti Leppihalme

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    10 Citations (Scopus)

    Abstract

    A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.
    Original languageEnglish
    Title of host publicationIntegrated Optical Devices
    Subtitle of host publicationFabrication and Testing
    EditorsGiancarlo C. Righini
    PublisherInternational Society for Optics and Photonics SPIE
    Pages183-194
    ISBN (Print)0-8194-4739-0
    DOIs
    Publication statusPublished - 2003
    MoE publication typeA4 Article in a conference publication
    EventPhotonics Fabrication Europe 2002 (PFE'02) - Bruges, Belgium
    Duration: 30 Oct 20021 Nov 2002

    Publication series

    SeriesProceedings of SPIE
    Volume4944
    ISSN0277-786X

    Conference

    ConferencePhotonics Fabrication Europe 2002 (PFE'02)
    CountryBelgium
    CityBruges
    Period30/10/021/11/02

    Fingerprint

    insulators
    waveguides
    fabrication
    silicon
    ridges
    polarization
    directional couplers
    optical switching
    couplers
    telecommunication
    switches
    photonics
    mirrors
    interference
    propagation
    evaluation
    wavelengths
    crystals

    Keywords

    • silicon-on-insulator
    • SOI
    • waveguide
    • polarization
    • thermo-optical switch
    • photonic integrated circuit

    Cite this

    Aalto, T., Heimala, P., Yliniemi, S., Kapulainen, M., & Leppihalme, M. (2003). Fabrication and characterization of waveguide structures on SOI. In G. C. Righini (Ed.), Integrated Optical Devices: Fabrication and Testing (pp. 183-194). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4944 https://doi.org/10.1117/12.477283
    Aalto, Timo ; Heimala, Päivi ; Yliniemi, Sanna ; Kapulainen, Markku ; Leppihalme, Matti. / Fabrication and characterization of waveguide structures on SOI. Integrated Optical Devices: Fabrication and Testing. editor / Giancarlo C. Righini. International Society for Optics and Photonics SPIE, 2003. pp. 183-194 (Proceedings of SPIE, Vol. 4944).
    @inproceedings{a77d1138d9c847238a88573c4ac365c7,
    title = "Fabrication and characterization of waveguide structures on SOI",
    abstract = "A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.",
    keywords = "silicon-on-insulator, SOI, waveguide, polarization, thermo-optical switch, photonic integrated circuit",
    author = "Timo Aalto and P{\"a}ivi Heimala and Sanna Yliniemi and Markku Kapulainen and Matti Leppihalme",
    note = "CA2: TTE6 CA: TTE Project code: T3SU00062",
    year = "2003",
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    Aalto, T, Heimala, P, Yliniemi, S, Kapulainen, M & Leppihalme, M 2003, Fabrication and characterization of waveguide structures on SOI. in GC Righini (ed.), Integrated Optical Devices: Fabrication and Testing. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 4944, pp. 183-194, Photonics Fabrication Europe 2002 (PFE'02), Bruges, Belgium, 30/10/02. https://doi.org/10.1117/12.477283

    Fabrication and characterization of waveguide structures on SOI. / Aalto, Timo; Heimala, Päivi; Yliniemi, Sanna; Kapulainen, Markku; Leppihalme, Matti.

    Integrated Optical Devices: Fabrication and Testing. ed. / Giancarlo C. Righini. International Society for Optics and Photonics SPIE, 2003. p. 183-194 (Proceedings of SPIE, Vol. 4944).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    AU - Kapulainen, Markku

    AU - Leppihalme, Matti

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    N2 - A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.

    AB - A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.

    KW - silicon-on-insulator

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    BT - Integrated Optical Devices

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    PB - International Society for Optics and Photonics SPIE

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    Aalto T, Heimala P, Yliniemi S, Kapulainen M, Leppihalme M. Fabrication and characterization of waveguide structures on SOI. In Righini GC, editor, Integrated Optical Devices: Fabrication and Testing. International Society for Optics and Photonics SPIE. 2003. p. 183-194. (Proceedings of SPIE, Vol. 4944). https://doi.org/10.1117/12.477283