Fabrication and characterization of waveguide structures on SOI

Timo Aalto, Päivi Heimala, Sanna Yliniemi, Markku Kapulainen, Matti Leppihalme

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    10 Citations (Scopus)


    A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.
    Original languageEnglish
    Title of host publicationIntegrated Optical Devices
    Subtitle of host publicationFabrication and Testing
    EditorsGiancarlo C. Righini
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-4739-5
    Publication statusPublished - 2003
    MoE publication typeA4 Article in a conference publication
    EventPhotonics Fabrication Europe 2002 (PFE'02) - Bruges, Belgium
    Duration: 30 Oct 20021 Nov 2002

    Publication series

    SeriesProceedings of SPIE


    ConferencePhotonics Fabrication Europe 2002 (PFE'02)


    • silicon-on-insulator
    • SOI
    • waveguide
    • polarization
    • thermo-optical switch
    • photonic integrated circuit


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