Fabrication and characterization of waveguide structures on SOI

Timo Aalto, Päivi Heimala, Sanna Yliniemi, Markku Kapulainen, Matti Leppihalme

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

10 Citations (Scopus)

Abstract

A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.
Original languageEnglish
Title of host publicationIntegrated Optical Devices
Subtitle of host publicationFabrication and Testing
EditorsGiancarlo C. Righini
PublisherInternational Society for Optics and Photonics SPIE
Pages183-194
ISBN (Print)0-8194-4739-0
DOIs
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication
EventPhotonics Fabrication Europe 2002 (PFE'02) - Bruges, Belgium
Duration: 30 Oct 20021 Nov 2002

Publication series

SeriesProceedings of SPIE
Volume4944
ISSN0277-786X

Conference

ConferencePhotonics Fabrication Europe 2002 (PFE'02)
CountryBelgium
CityBruges
Period30/10/021/11/02

Fingerprint

insulators
waveguides
fabrication
silicon
ridges
polarization
directional couplers
optical switching
couplers
telecommunication
switches
photonics
mirrors
interference
propagation
evaluation
wavelengths
crystals

Keywords

  • silicon-on-insulator
  • SOI
  • waveguide
  • polarization
  • thermo-optical switch
  • photonic integrated circuit

Cite this

Aalto, T., Heimala, P., Yliniemi, S., Kapulainen, M., & Leppihalme, M. (2003). Fabrication and characterization of waveguide structures on SOI. In G. C. Righini (Ed.), Integrated Optical Devices: Fabrication and Testing (pp. 183-194). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4944 https://doi.org/10.1117/12.477283
Aalto, Timo ; Heimala, Päivi ; Yliniemi, Sanna ; Kapulainen, Markku ; Leppihalme, Matti. / Fabrication and characterization of waveguide structures on SOI. Integrated Optical Devices: Fabrication and Testing. editor / Giancarlo C. Righini. International Society for Optics and Photonics SPIE, 2003. pp. 183-194 (Proceedings of SPIE, Vol. 4944).
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title = "Fabrication and characterization of waveguide structures on SOI",
abstract = "A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.",
keywords = "silicon-on-insulator, SOI, waveguide, polarization, thermo-optical switch, photonic integrated circuit",
author = "Timo Aalto and P{\"a}ivi Heimala and Sanna Yliniemi and Markku Kapulainen and Matti Leppihalme",
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Aalto, T, Heimala, P, Yliniemi, S, Kapulainen, M & Leppihalme, M 2003, Fabrication and characterization of waveguide structures on SOI. in GC Righini (ed.), Integrated Optical Devices: Fabrication and Testing. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 4944, pp. 183-194, Photonics Fabrication Europe 2002 (PFE'02), Bruges, Belgium, 30/10/02. https://doi.org/10.1117/12.477283

Fabrication and characterization of waveguide structures on SOI. / Aalto, Timo; Heimala, Päivi; Yliniemi, Sanna; Kapulainen, Markku; Leppihalme, Matti.

Integrated Optical Devices: Fabrication and Testing. ed. / Giancarlo C. Righini. International Society for Optics and Photonics SPIE, 2003. p. 183-194 (Proceedings of SPIE, Vol. 4944).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - A survey of the most common silicon-on-insulator (SOI) substrates and waveguide structures, as well as an evaluation of their applicability in optical telecommunication at the 1550 nm wavelength is presented. The design, fabrication and characterization of straight and bent SOI waveguides, as well as a thermo-optical SOI switch are described. The propagation loss of the realized SOI waveguides is below 0.25 dB/cm and thermo-optical switching is demonstrated at 10 kHz. The effect of cladding material on top SOI ridge waveguides on the polarization properties of straight and bent waveguides, as well as on directional couplers, is discussed. Both polarization independent and polarization maintaining waveguides are demonstrated. Finally, a basic principle of multi-step SOI waveguides is proposed. As examples of the potential in multi-step processing, efficient coupling between different rectangular, ridge and photonic crystal waveguides, ultra-small bends, waveguide mirrors, and extremely short multi-mode interference couplers are described.

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Aalto T, Heimala P, Yliniemi S, Kapulainen M, Leppihalme M. Fabrication and characterization of waveguide structures on SOI. In Righini GC, editor, Integrated Optical Devices: Fabrication and Testing. International Society for Optics and Photonics SPIE. 2003. p. 183-194. (Proceedings of SPIE, Vol. 4944). https://doi.org/10.1117/12.477283