Fabrication and characterization of waveguide structures on SOI

Timo Aalto, Päivi Heimala, Sanna Yliniemi, Markku Kapulainen, Matti Leppihalme

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    10 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Fabrication and characterization of waveguide structures on SOI'. Together they form a unique fingerprint.

    Physics & Astronomy