Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

Pradeep Dixit (Corresponding Author), Tapani Vehmas, Sami Vähänen, Philippe Monnoyer, Kimmo Henttinen

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science