Fabrication and packaging of optical components and microsystems

Juha Rantala, Janne Aikio, Pentti Karioja, Michael Descour, Harri Kopola, Jorma Lammasniemi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationMicro-Opto-Electro-Mechanical Systems
Pages140-149
DOIs
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventInternational Symposium on Applied Photonics - Glasgow, United Kingdom
Duration: 22 May 200023 May 2000

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume4075

Conference

ConferenceInternational Symposium on Applied Photonics
CountryUnited Kingdom
CityGlasgow
Period22/05/0023/05/00

Cite this

Rantala, J., Aikio, J., Karioja, P., Descour, M., Kopola, H., & Lammasniemi, J. (2000). Fabrication and packaging of optical components and microsystems. In Micro-Opto-Electro-Mechanical Systems (pp. 140-149). Proceedings of SPIE, Vol.. 4075 https://doi.org/10.1117/12.397926
Rantala, Juha ; Aikio, Janne ; Karioja, Pentti ; Descour, Michael ; Kopola, Harri ; Lammasniemi, Jorma. / Fabrication and packaging of optical components and microsystems. Micro-Opto-Electro-Mechanical Systems. 2000. pp. 140-149 (Proceedings of SPIE, Vol. 4075).
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title = "Fabrication and packaging of optical components and microsystems",
author = "Juha Rantala and Janne Aikio and Pentti Karioja and Michael Descour and Harri Kopola and Jorma Lammasniemi",
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series = "Proceedings of SPIE",
publisher = "SPIE",
pages = "140--149",
booktitle = "Micro-Opto-Electro-Mechanical Systems",

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Rantala, J, Aikio, J, Karioja, P, Descour, M, Kopola, H & Lammasniemi, J 2000, Fabrication and packaging of optical components and microsystems. in Micro-Opto-Electro-Mechanical Systems. Proceedings of SPIE, vol. 4075, pp. 140-149, International Symposium on Applied Photonics, Glasgow, United Kingdom, 22/05/00. https://doi.org/10.1117/12.397926

Fabrication and packaging of optical components and microsystems. / Rantala, Juha; Aikio, Janne; Karioja, Pentti; Descour, Michael; Kopola, Harri; Lammasniemi, Jorma.

Micro-Opto-Electro-Mechanical Systems. 2000. p. 140-149 (Proceedings of SPIE, Vol. 4075).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Fabrication and packaging of optical components and microsystems

AU - Rantala, Juha

AU - Aikio, Janne

AU - Karioja, Pentti

AU - Descour, Michael

AU - Kopola, Harri

AU - Lammasniemi, Jorma

PY - 2000

Y1 - 2000

U2 - 10.1117/12.397926

DO - 10.1117/12.397926

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

SP - 140

EP - 149

BT - Micro-Opto-Electro-Mechanical Systems

ER -

Rantala J, Aikio J, Karioja P, Descour M, Kopola H, Lammasniemi J. Fabrication and packaging of optical components and microsystems. In Micro-Opto-Electro-Mechanical Systems. 2000. p. 140-149. (Proceedings of SPIE, Vol. 4075). https://doi.org/10.1117/12.397926