Fabrication and packaging of optical components and microsystems

Juha Rantala, Janne Aikio, Pentti Karioja, Michael Descour, Harri Kopola, Jorma Lammasniemi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationMicro-Opto-Electro-Mechanical Systems
Pages140-149
DOIs
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventInternational Symposium on Applied Photonics - Glasgow, United Kingdom
Duration: 22 May 200023 May 2000

Publication series

SeriesProceedings of SPIE
Volume4075

Conference

ConferenceInternational Symposium on Applied Photonics
CountryUnited Kingdom
CityGlasgow
Period22/05/0023/05/00

Cite this

Rantala, J., Aikio, J., Karioja, P., Descour, M., Kopola, H., & Lammasniemi, J. (2000). Fabrication and packaging of optical components and microsystems. In Micro-Opto-Electro-Mechanical Systems (pp. 140-149). Proceedings of SPIE, Vol.. 4075 https://doi.org/10.1117/12.397926