@inproceedings{42726a9ca3e447a6a3da58ff58d511dc,
title = "Fabrication and packaging of optical components and microsystems",
author = "Juha Rantala and Janne Aikio and Pentti Karioja and Michael Descour and Harri Kopola and Jorma Lammasniemi",
year = "2000",
doi = "10.1117/12.397926",
language = "English",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "140--149",
booktitle = "Micro-Opto-Electro-Mechanical Systems",
note = "International Symposium on Applied Photonics ; Conference date: 22-05-2000 Through 23-05-2000",
}