Fabrication and packaging of optical components and microsystems

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Micro-Opto-Electro-Mechanical Systems
Pages	140-149
DOIs	https://doi.org/10.1117/12.397926
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	International Symposium on Applied Photonics - Glasgow, United Kingdom Duration: 22 May 2000 → 23 May 2000

Series	Proceedings of SPIE
Volume	4075

Conference	International Symposium on Applied Photonics
Country/Territory	United Kingdom
City	Glasgow
Period	22/05/00 → 23/05/00

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{42726a9ca3e447a6a3da58ff58d511dc,

title = "Fabrication and packaging of optical components and microsystems",

author = "Juha Rantala and Janne Aikio and Pentti Karioja and Michael Descour and Harri Kopola and Jorma Lammasniemi",

year = "2000",

doi = "10.1117/12.397926",

language = "English",

series = "Proceedings of SPIE",

publisher = "International society for productivity enhancement (ISPE)",

pages = "140--149",

booktitle = "Micro-Opto-Electro-Mechanical Systems",

note = "International Symposium on Applied Photonics ; Conference date: 22-05-2000 Through 23-05-2000",

}

TY - GEN

T1 - Fabrication and packaging of optical components and microsystems

AU - Rantala, Juha

AU - Aikio, Janne

AU - Karioja, Pentti

AU - Descour, Michael

AU - Kopola, Harri

AU - Lammasniemi, Jorma

PY - 2000

Y1 - 2000

U2 - 10.1117/12.397926

DO - 10.1117/12.397926

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

SP - 140

EP - 149

BT - Micro-Opto-Electro-Mechanical Systems

T2 - International Symposium on Applied Photonics

Y2 - 22 May 2000 through 23 May 2000

ER -