Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate

Xiaopeng Wu, Markku Kainlauri, Hannu Ronkainen, Salla Repo, Hele Savin, Jan Jakubek, Sami Vähänen

    Research output: Contribution to conferenceConference articleScientific

    Abstract

    Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.
    Original languageEnglish
    Publication statusPublished - 2015
    EventIEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015 - San Diego, United States
    Duration: 31 Oct 20157 Nov 2015

    Conference

    ConferenceIEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015
    Abbreviated titleNSS/MIC 2015
    CountryUnited States
    CitySan Diego
    Period31/10/157/11/15

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  • Cite this

    Wu, X., Kainlauri, M., Ronkainen, H., Repo, S., Savin, H., Jakubek, J., & Vähänen, S. (2015). Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.