Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate

Xiaopeng Wu, Markku Kainlauri, Hannu Ronkainen, Salla Repo, Hele Savin, Jan Jakubek, Sami Vähänen

Research output: Contribution to conferenceConference articleScientific

Abstract

Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.
Original languageEnglish
Publication statusPublished - 2015
EventIEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015 - San Diego, United States
Duration: 31 Oct 20157 Nov 2015

Conference

ConferenceIEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015
Abbreviated titleNSS/MIC 2015
CountryUnited States
CitySan Diego
Period31/10/157/11/15

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radiation detectors
atomic layer epitaxy
pixels
fabrication
sensors
isolation
silicon
chips
sprayers
readout
aluminum oxides
breakdown
diodes
wafers
detectors
x rays

Cite this

Wu, X., Kainlauri, M., Ronkainen, H., Repo, S., Savin, H., Jakubek, J., & Vähänen, S. (2015). Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.
Wu, Xiaopeng ; Kainlauri, Markku ; Ronkainen, Hannu ; Repo, Salla ; Savin, Hele ; Jakubek, Jan ; Vähänen, Sami. / Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.
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abstract = "Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.",
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Wu, X, Kainlauri, M, Ronkainen, H, Repo, S, Savin, H, Jakubek, J & Vähänen, S 2015, 'Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate' Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States, 31/10/15 - 7/11/15, .

Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. / Wu, Xiaopeng; Kainlauri, Markku; Ronkainen, Hannu; Repo, Salla; Savin, Hele; Jakubek, Jan; Vähänen, Sami.

2015. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate

AU - Wu, Xiaopeng

AU - Kainlauri, Markku

AU - Ronkainen, Hannu

AU - Repo, Salla

AU - Savin, Hele

AU - Jakubek, Jan

AU - Vähänen, Sami

PY - 2015

Y1 - 2015

N2 - Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.

AB - Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.

M3 - Conference article

ER -

Wu X, Kainlauri M, Ronkainen H, Repo S, Savin H, Jakubek J et al. Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. 2015. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.