Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate

Xiaopeng Wu, Markku Kainlauri, Hannu Ronkainen, Salla Repo, Hele Savin, Jan Jakubek, Sami Vähänen

    Research output: Contribution to conferenceConference articleScientific

    Abstract

    Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.
    Original languageEnglish
    Publication statusPublished - 2015
    EventIEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015 - San Diego, United States
    Duration: 31 Oct 20157 Nov 2015

    Conference

    ConferenceIEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015
    Abbreviated titleNSS/MIC 2015
    CountryUnited States
    CitySan Diego
    Period31/10/157/11/15

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    radiation detectors
    atomic layer epitaxy
    pixels
    fabrication
    sensors
    isolation
    silicon
    chips
    sprayers
    readout
    aluminum oxides
    breakdown
    diodes
    wafers
    detectors
    x rays

    Cite this

    Wu, X., Kainlauri, M., Ronkainen, H., Repo, S., Savin, H., Jakubek, J., & Vähänen, S. (2015). Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.
    Wu, Xiaopeng ; Kainlauri, Markku ; Ronkainen, Hannu ; Repo, Salla ; Savin, Hele ; Jakubek, Jan ; Vähänen, Sami. / Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.
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    title = "Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate",
    abstract = "Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.",
    author = "Xiaopeng Wu and Markku Kainlauri and Hannu Ronkainen and Salla Repo and Hele Savin and Jan Jakubek and Sami V{\"a}h{\"a}nen",
    year = "2015",
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    Wu, X, Kainlauri, M, Ronkainen, H, Repo, S, Savin, H, Jakubek, J & Vähänen, S 2015, 'Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate', Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States, 31/10/15 - 7/11/15.

    Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. / Wu, Xiaopeng; Kainlauri, Markku; Ronkainen, Hannu; Repo, Salla; Savin, Hele; Jakubek, Jan; Vähänen, Sami.

    2015. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.

    Research output: Contribution to conferenceConference articleScientific

    TY - CONF

    T1 - Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate

    AU - Wu, Xiaopeng

    AU - Kainlauri, Markku

    AU - Ronkainen, Hannu

    AU - Repo, Salla

    AU - Savin, Hele

    AU - Jakubek, Jan

    AU - Vähänen, Sami

    PY - 2015

    Y1 - 2015

    N2 - Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.

    AB - Interpixel isolation is a problem for any segmented p-type sensor. The commonly used approachs to improve the interpixel isolation is to introduce so-call p-spray and p-stop, which complicates the fabrication process and increase the likelihood of early breakdown. We used ALD (atomic layer deposition) to make alumia as interpixel dielectrics for n-implants on p-substrate. We fabricated the Medipix pixel sensors and diodes on the 150 mm p-type magnetic Czochralski silicon substrate. Process was optimized to avoid the thermal donors and maximize the negative charges existing at the interface between silicon and alumina. Preliminary results show a good uniformity across the wafer. Medipix pixel sensors are assembled on the Timpeix readout chips by low temperatue flip-chip bonding. Detectors are characterized with X-rays and radioactive sources and the spectroscopic results will be presented.

    M3 - Conference article

    ER -

    Wu X, Kainlauri M, Ronkainen H, Repo S, Savin H, Jakubek J et al. Fabrication of ALD-reinforced pixel radiation detectors on magnetic Czochralski silicon substrate. 2015. Paper presented at IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2015, San Diego, United States.