Fabrication of Bragg grating structures on silicon

Päivi Heimala, Timo Aalto, Sanna Yliniemi, Janne Simonen, Markku Kuittinen, Jari Turunen, Matti Leppihalme

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publication19th Nordic Semiconductor Meeting: Abstracts
    Publication statusPublished - 2001
    MoE publication typeNot Eligible
    Event19th Nordic Semiconductor Meeting, NSM19
    - Copenhagen, Denmark
    Duration: 20 May 200123 May 2001


    Conference19th Nordic Semiconductor Meeting, NSM19
    Abbreviated titleNSM19

    Cite this

    Heimala, P., Aalto, T., Yliniemi, S., Simonen, J., Kuittinen, M., Turunen, J., & Leppihalme, M. (2001). Fabrication of Bragg grating structures on silicon. In 19th Nordic Semiconductor Meeting: Abstracts [91]