Fabrication of GaN Structures with Embedded Network of Voids Using Pillar Patterned GaN Templates

  • Olli Svensk
  • , Muhammad Ali
  • , Lauri Riuttanen
  • , Pekka Törmä
  • , Sakari Sintonen
  • , Sami Suihkonen
  • , Markku Sopanen
  • , Harri Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)42-45
Number of pages4
JournalJournal of Crystal Growth
Volume370
DOIs
Publication statusPublished - 1 May 2013
MoE publication typeA1 Journal article-refereed

Keywords

  • defects
  • etching
  • MOCVD
  • nitrides
  • selective epitaxy

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