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Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates

  • Massimiliano Dispenza
  • , Roberta Buttiglione
  • , Anna Maria Fiorello
  • , Jarkko Tuominen
  • , Kari Kautio
  • , Ollila Jyrki
  • , Pentti Korhonen
  • , Manu Lahdes
  • , Daniele Pochesci
  • , Kari Rönkä
  • , S. Catoni
  • , R. Marcelli
  • , V. Foglietti
  • , E. Cianci
  • , A. Coppa

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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