Fabrication of high performance RF-MEMS structures on surface planarised LTCC substrates

Massimiliano Dispenza, Roberta Buttiglione, Anna Maria Fiorello, Jarkko Tuominen, Kari Kautio, Ollila Jyrki, Pentti Korhonen, Manu Lahdes, Daniele Pochesci, Kari Rönkä, S. Catoni, R. Marcelli, V. Foglietti, E. Cianci, A. Coppa

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Physics & Astronomy