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Fabrication of InP/SiO2/Si substrate using ion-cutting process and selective chemical etching

  • Peng Chen
  • , Dapeng Xu
  • , Luke Mawst
  • , Kimmo Henttinen
  • , Tommi Suni
  • , Ilkka Suni
  • , T.F. Kuech
  • , S.S. Lau
  • University of California, San Diego
  • University of Wisconsin-Madison

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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