Fabrication of ion-exchanged channel waveguides directly into integrated circuit mask plates

Seppo Honkanen, Ari Tervonen, Hans von Bagh, Arto Salin, Matti Leppihalme

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

Abstract

Optical channel waveguides have been fabricated into integrated circuit lithography mask plates by silver‐sodium ion exchange.
The process combines the advantages of Ag thin‐film ion sources and the accurate and reliable patterning of chromium films on mask plates.
The process is potentially suitable for cheap mass production, since no lithography is needed during the actual waveguide fabrication. The tailoring of waveguide cross sections by modifying the electric field distribution inside the glass is also presented.
Original languageEnglish
Pages (from-to)296-298
JournalApplied Physics Letters
Volume51
Issue number5
DOIs
Publication statusPublished - 1987
MoE publication typeA1 Journal article-refereed

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