Fabrication of mesas with micro- and nanopatterned surface relief used as working stamps for step and stamp imprint lithography

Arne Schleunitz, Christian Spreu, Tomi Haatainen, Anna Klukowska, Helmut Schift (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    8 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Fabrication of mesas with micro- and nanopatterned surface relief used as working stamps for step and stamp imprint lithography'. Together they form a unique fingerprint.

    INIS

    Engineering

    Material Science

    Keyphrases