Fabrication of mesoscopic semiconductor structures

Research output: Book/ReportBook (author)

Original languageEnglish
Place of PublicationHelsinki
Number of pages48
Publication statusPublished - 1995
MoE publication typeNot Eligible

Publication series

SeriesActa polytechnica Scandinavica: Ph Applied Physics Series
Volume201
ISSN0355-2721

Cite this

Ahopelto, J. (1995). Fabrication of mesoscopic semiconductor structures. Acta polytechnica Scandinavica: Ph Applied Physics Series, Vol.. 201