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Fabrication of micro-optical structures by applying negative tone hybrid glass materials and greyscale lithography
Ari Kärkkäinen
, J.T. Rantala
, M.R. Descour
VTT Technical Research Centre of Finland
University of Arizona
VTT (former employee or external)
Research output
:
Contribution to journal
›
Article
›
Scientific
›
peer-review
9
Citations (Scopus)
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Dive into the research topics of 'Fabrication of micro-optical structures by applying negative tone hybrid glass materials and greyscale lithography'. Together they form a unique fingerprint.
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Keyphrases
Optical Structure
100%
Hybrid Glass
100%
Glass Material
100%
Negative Tone
100%
Greyscale Lithography
100%
Surface Roughness
33%
Material Feature
33%
Refractive Index
33%
Extinction Coefficient
33%
Pattern Structures
33%
Opto-mechanical Structure
33%
Lithographic Patterning
33%
Abbe number
33%
Greyscale
33%
Binary Photomask
33%
Lenslet Array
33%
Engineering
Mechanical Structure
100%
Lithography
100%
Refractive Index
100%
Extinction Coefficient
100%
Refractivity
100%
INIS
hybrids
100%
fabrication
100%
glass
100%
surfaces
33%
thickness
33%
roughness
33%
refractive index
33%
lenses
33%
mechanical structures
33%
Material Science
Surface Roughness
100%
Lithography
100%
Refractive Index
100%