@inbook{1ec6b83ed94c4c8784e101e319531080,
title = "Fabrication of narrow aluminium patterns by i-line optical lithography",
author = "Jyrki Kiiham{\"a}ki and Kari Leinonen",
year = "1994",
language = "English",
pages = "76",
editor = "Gislason, {Haflidi P.} and Vidar Gudmundsson and Gerlinde Xander",
booktitle = "16th Nordic Semiconductor Meeting",
publisher = "University of Iceland",
address = "Iceland",
note = "16th Nordic Semiconductor Meeting ; Conference date: 12-06-1994 Through 15-06-1994",
}