Fabrication of optical devices by rotation controlled nanoimprinting

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific


In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.
Original languageEnglish
Title of host publicationProceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting
EditorsM. Dal Maso, E. Holmström
Place of PublicationHelsinki
PublisherUniversity of Helsinki
ISBN (Print)978-952-10-6872-0
Publication statusPublished - 2011
MoE publication typeNot Eligible
EventPhysics Days - Fysiikan päivät 2011: The 45th annual meeting of the Finnish Physical Society and the second Nordic physics meeting - Scandic Marina Congress Center, Helsinki, Finland
Duration: 29 Mar 201131 Mar 2011
Conference number: 45

Publication series

SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics D


ConferencePhysics Days - Fysiikan päivät 2011


  • NIL
  • nanoimprinting
  • hot embossing

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