Fabrication of optical devices by rotation controlled nanoimprinting

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific


    In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.
    Original languageEnglish
    Title of host publicationProceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting
    EditorsM. Dal Maso, E. Holmström
    Place of PublicationHelsinki
    PublisherUniversity of Helsinki
    ISBN (Print)978-952-10-6872-0
    Publication statusPublished - 2011
    MoE publication typeNot Eligible
    EventPhysics Days - Fysiikan päivät 2011: The 45th annual meeting of the Finnish Physical Society and the second Nordic physics meeting - Scandic Marina Congress Center, Helsinki, Finland
    Duration: 29 Mar 201131 Mar 2011
    Conference number: 45

    Publication series

    SeriesUniversity of Helsinki: Department of Physics. Report Series in Physics D


    ConferencePhysics Days - Fysiikan päivät 2011


    • NIL
    • nanoimprinting
    • hot embossing


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