Fabrication of optical devices by rotation controlled nanoimprinting

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Abstract

In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.
Original languageEnglish
Title of host publicationProceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting
EditorsM. Dal Maso, E. Holmström
Place of PublicationHelsinki
PublisherUniversity of Helsinki
Pages210
ISBN (Print)978-952-10-6872-0
Publication statusPublished - 2011
MoE publication typeNot Eligible
EventPhysics Days - Fysiikan päivät 2011: The 45th annual meeting of the Finnish Physical Society and the second Nordic physics meeting - Scandic Marina Congress Center, Helsinki, Finland
Duration: 29 Mar 201131 Mar 2011
Conference number: 45

Publication series

NameReport series in physics
PublisherUniversity of Helsinki
NumberHU-P-D178

Conference

ConferencePhysics Days - Fysiikan päivät 2011
CountryFinland
CityHelsinki
Period29/03/1131/03/11

Fingerprint

fabrication
gratings
positioning
atomic force microscopy
microscopy
scanning electron microscopy
polymers

Keywords

  • NIL
  • nanoimprinting
  • hot embossing

Cite this

Haatainen, T., Mäkelä, T., & Ahopelto, J. (2011). Fabrication of optical devices by rotation controlled nanoimprinting. In M. Dal Maso, & E. Holmström (Eds.), Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting (pp. 210). [P1.77] Helsinki: University of Helsinki. University of Helsinki: Department of Physics. Report Series in Physics D, No. HU-P-D178
Haatainen, Tomi ; Mäkelä, Tapio ; Ahopelto, Jouni. / Fabrication of optical devices by rotation controlled nanoimprinting. Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting. editor / M. Dal Maso ; E. Holmström. Helsinki : University of Helsinki, 2011. pp. 210 (University of Helsinki: Department of Physics. Report Series in Physics D; No. HU-P-D178).
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Haatainen, T, Mäkelä, T & Ahopelto, J 2011, Fabrication of optical devices by rotation controlled nanoimprinting. in M Dal Maso & E Holmström (eds), Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting., P1.77, University of Helsinki, Helsinki, University of Helsinki: Department of Physics. Report Series in Physics D, no. HU-P-D178, pp. 210, Physics Days - Fysiikan päivät 2011, Helsinki, Finland, 29/03/11.

Fabrication of optical devices by rotation controlled nanoimprinting. / Haatainen, Tomi (Corresponding author); Mäkelä, Tapio; Ahopelto, Jouni.

Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting. ed. / M. Dal Maso; E. Holmström. Helsinki : University of Helsinki, 2011. p. 210 P1.77 (University of Helsinki: Department of Physics. Report Series in Physics D; No. HU-P-D178).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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AB - In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.

KW - NIL

KW - nanoimprinting

KW - hot embossing

M3 - Conference abstract in proceedings

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Haatainen T, Mäkelä T, Ahopelto J. Fabrication of optical devices by rotation controlled nanoimprinting. In Dal Maso M, Holmström E, editors, Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting. Helsinki: University of Helsinki. 2011. p. 210. P1.77. (University of Helsinki: Department of Physics. Report Series in Physics D; No. HU-P-D178).