Fabrication of optical devices by rotation controlled nanoimprinting

Tomi Haatainen; Tapio Mäkelä; Jouni Ahopelto

Fabrication of optical devices by rotation controlled nanoimprinting

Tomi Haatainen^*
, Tapio Mäkelä
, Jouni Ahopelto

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Abstract

In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.

Original language	English
Title of host publication	Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting
Editors	M. Dal Maso, E. Holmström
Place of Publication	Helsinki
Publisher	University of Helsinki
Pages	210
ISBN (Print)	978-952-10-6872-0
Publication status	Published - 2011
MoE publication type	Not Eligible
Event	Physics Days - Fysiikan päivät 2011: The 45th annual meeting of the Finnish Physical Society and the second Nordic physics meeting - Scandic Marina Congress Center, Helsinki, Finland Duration: 29 Mar 2011 → 31 Mar 2011 Conference number: 45

Publication series

Series	University of Helsinki: Department of Physics. Report Series in Physics D
Number	HU-P-D178

Conference

Conference	Physics Days - Fysiikan päivät 2011
Country/Territory	Finland
City	Helsinki
Period	29/03/11 → 31/03/11

Keywords

NIL
nanoimprinting
hot embossing

Access to Document

https://www.physics.helsinki.fi/fp2011/uploads/Proceedings.pdf

Cite this

Haatainen, T., Mäkelä, T., & Ahopelto, J. (2011). Fabrication of optical devices by rotation controlled nanoimprinting. In M. Dal Maso, & E. Holmström (Eds.), Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting (pp. 210). Article P1.77 University of Helsinki. https://www.physics.helsinki.fi/fp2011/uploads/Proceedings.pdf

Haatainen, Tomi ; Mäkelä, Tapio ; Ahopelto, Jouni. / Fabrication of optical devices by rotation controlled nanoimprinting. Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting. editor / M. Dal Maso ; E. Holmström. Helsinki : University of Helsinki, 2011. pp. 210 (University of Helsinki: Department of Physics. Report Series in Physics D; No. HU-P-D178).

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title = "Fabrication of optical devices by rotation controlled nanoimprinting",

abstract = "In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.",

keywords = "NIL, nanoimprinting, hot embossing",

author = "Tomi Haatainen and Tapio M{\"a}kel{\"a} and Jouni Ahopelto",

year = "2011",

language = "English",

isbn = "978-952-10-6872-0",

series = "University of Helsinki: Department of Physics. Report Series in Physics D",

publisher = "University of Helsinki",

number = "HU-P-D178",

pages = "210",

editor = "\{Dal Maso\}, M. and E. Holmstr{\"o}m",

booktitle = "Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting",

address = "Finland",

note = "Physics Days - Fysiikan p{\"a}iv{\"a}t 2011 : The 45th annual meeting of the Finnish Physical Society and the second Nordic physics meeting ; Conference date: 29-03-2011 Through 31-03-2011",

}

Haatainen, T , Mäkelä, T & Ahopelto, J 2011, Fabrication of optical devices by rotation controlled nanoimprinting. in M Dal Maso & E Holmström (eds), Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting., P1.77, University of Helsinki, Helsinki, University of Helsinki: Department of Physics. Report Series in Physics D, no. HU-P-D178, pp. 210, Physics Days - Fysiikan päivät 2011, Helsinki, Finland, 29/03/11. <https://www.physics.helsinki.fi/fp2011/uploads/Proceedings.pdf>

Fabrication of optical devices by rotation controlled nanoimprinting. / Haatainen, Tomi ; Mäkelä, Tapio ; Ahopelto, Jouni.
Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting. ed. / M. Dal Maso; E. Holmström. Helsinki: University of Helsinki, 2011. p. 210 P1.77 (University of Helsinki: Department of Physics. Report Series in Physics D; No. HU-P-D178).

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Fabrication of optical devices by rotation controlled nanoimprinting

AU - Haatainen, Tomi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

N1 - Conference code: 45

PY - 2011

Y1 - 2011

N2 - In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.

AB - In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown.

KW - NIL

KW - nanoimprinting

KW - hot embossing

M3 - Conference abstract in proceedings

SN - 978-952-10-6872-0

T3 - University of Helsinki: Department of Physics. Report Series in Physics D

SP - 210

BT - Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting

A2 - Dal Maso, M.

A2 - Holmström, E.

PB - University of Helsinki

CY - Helsinki

T2 - Physics Days - Fysiikan päivät 2011

Y2 - 29 March 2011 through 31 March 2011

ER -

Haatainen T , Mäkelä T , Ahopelto J. Fabrication of optical devices by rotation controlled nanoimprinting. In Dal Maso M, Holmström E, editors, Proceedings of the XLV Annual Conference of the Finnish Physical Society and the Second Nordic Physics Meeting. Helsinki: University of Helsinki. 2011. p. 210. P1.77. (University of Helsinki: Department of Physics. Report Series in Physics D; No. HU-P-D178).

Fabrication of optical devices by rotation controlled nanoimprinting

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