Fabrication of optical inverted-rib waveguides using UV-imprinting

M. Wang (Corresponding Author), Jussi Hiltunen, Sanna Uusitalo, J. Puustinen, J. Lappalainen, Pentti Karioja, R. Myllylä

Research output: Contribution to journalArticleScientificpeer-review

33 Citations (Scopus)

Abstract

In this paper we introduce a fabrication process for polymer rib waveguides that uses UV-imprint lithography. In the structure of an inverted-rib waveguide, the lower cladding of the waveguide is patterned by UV-imprinting and the waveguiding layer is subsequently spin-coated. That makes the thickness of the formed slab layer on the rib waveguide controllable by tuning the spin-coating parameters. The fabrication process utilizes two steps of UV-imprinting. The first one is to form a rigid polymer mold from positive tone photoresist. The second one is to pattern the waveguide lower cladding with the formed polymer mold. Through the two steps of UV-imprinting, rib waveguides can be fabricated without an etching procedure. We demonstrated the proposed fabrication process by fabricating 2-μm-wide waveguides operating in single mode at 1310 nm. With TE-polarized light, the fabricated waveguides show an average transmission of 58.6% in a 30 mm long waveguide, corresponding to a loss of 2.3 dB.
Original languageEnglish
Pages (from-to)175-178
Number of pages4
JournalMicroelectronic Engineering
Volume88
Issue number2
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Fingerprint

Waveguides
waveguides
Fabrication
fabrication
Polymers
polymers
Spin coating
Photoresists
Light polarization
photoresists
polarized light
Lithography
coating
Etching
slabs
lithography
Tuning
tuning
etching

Keywords

  • Polymer waveguides
  • UV-imprint
  • fabrication
  • inverted-rib waveguides

Cite this

Wang, M. ; Hiltunen, Jussi ; Uusitalo, Sanna ; Puustinen, J. ; Lappalainen, J. ; Karioja, Pentti ; Myllylä, R. / Fabrication of optical inverted-rib waveguides using UV-imprinting. In: Microelectronic Engineering. 2010 ; Vol. 88, No. 2. pp. 175-178.
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abstract = "In this paper we introduce a fabrication process for polymer rib waveguides that uses UV-imprint lithography. In the structure of an inverted-rib waveguide, the lower cladding of the waveguide is patterned by UV-imprinting and the waveguiding layer is subsequently spin-coated. That makes the thickness of the formed slab layer on the rib waveguide controllable by tuning the spin-coating parameters. The fabrication process utilizes two steps of UV-imprinting. The first one is to form a rigid polymer mold from positive tone photoresist. The second one is to pattern the waveguide lower cladding with the formed polymer mold. Through the two steps of UV-imprinting, rib waveguides can be fabricated without an etching procedure. We demonstrated the proposed fabrication process by fabricating 2-μm-wide waveguides operating in single mode at 1310 nm. With TE-polarized light, the fabricated waveguides show an average transmission of 58.6{\%} in a 30 mm long waveguide, corresponding to a loss of 2.3 dB.",
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Fabrication of optical inverted-rib waveguides using UV-imprinting. / Wang, M. (Corresponding Author); Hiltunen, Jussi; Uusitalo, Sanna; Puustinen, J.; Lappalainen, J.; Karioja, Pentti; Myllylä, R.

In: Microelectronic Engineering, Vol. 88, No. 2, 2010, p. 175-178.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Fabrication of optical inverted-rib waveguides using UV-imprinting

AU - Wang, M.

AU - Hiltunen, Jussi

AU - Uusitalo, Sanna

AU - Puustinen, J.

AU - Lappalainen, J.

AU - Karioja, Pentti

AU - Myllylä, R.

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AB - In this paper we introduce a fabrication process for polymer rib waveguides that uses UV-imprint lithography. In the structure of an inverted-rib waveguide, the lower cladding of the waveguide is patterned by UV-imprinting and the waveguiding layer is subsequently spin-coated. That makes the thickness of the formed slab layer on the rib waveguide controllable by tuning the spin-coating parameters. The fabrication process utilizes two steps of UV-imprinting. The first one is to form a rigid polymer mold from positive tone photoresist. The second one is to pattern the waveguide lower cladding with the formed polymer mold. Through the two steps of UV-imprinting, rib waveguides can be fabricated without an etching procedure. We demonstrated the proposed fabrication process by fabricating 2-μm-wide waveguides operating in single mode at 1310 nm. With TE-polarized light, the fabricated waveguides show an average transmission of 58.6% in a 30 mm long waveguide, corresponding to a loss of 2.3 dB.

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