Fabrication of optical waveguides by imprinting: Usage of positive tone resist as a mould for UV-curable polymer

Jussi Hiltunen (Corresponding Author), Marianne Hiltunen, Pentti Karioja, Jarkko Puustinen, Jyrki Lappalainen

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

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Physics & Astronomy