Fabrication of polymer waveguide devices for sensor applications

Mu Cheng, Jussi Hiltunen, Meng Wang, Antti Suutala, Pentti Karioja, Risto Myllylä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.
Original languageEnglish
Title of host publicationLaser Applications in Life Sciences
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)9780819476524
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventLaser Applications in Life Sciences 2010 - Oulu, Finland
Duration: 9 Jun 201011 Jun 2010

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume7376

Conference

ConferenceLaser Applications in Life Sciences 2010
CountryFinland
CityOulu
Period9/06/1011/06/10

Fingerprint

waveguides
fabrication
sensors
polymers
light sources
platforms
ion beams

Cite this

Cheng, M., Hiltunen, J., Wang, M., Suutala, A., Karioja, P., & Myllylä, R. (2010). Fabrication of polymer waveguide devices for sensor applications. In Laser Applications in Life Sciences [73761A] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 7376 https://doi.org/10.1117/12.871119
Cheng, Mu ; Hiltunen, Jussi ; Wang, Meng ; Suutala, Antti ; Karioja, Pentti ; Myllylä, Risto. / Fabrication of polymer waveguide devices for sensor applications. Laser Applications in Life Sciences. International Society for Optics and Photonics SPIE, 2010. (Proceedings of SPIE, Vol. 7376).
@inproceedings{ec3901ecc3fb4903abc595c8625a42fb,
title = "Fabrication of polymer waveguide devices for sensor applications",
abstract = "The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.",
author = "Mu Cheng and Jussi Hiltunen and Meng Wang and Antti Suutala and Pentti Karioja and Risto Myllyl{\"a}",
year = "2010",
doi = "10.1117/12.871119",
language = "English",
isbn = "9780819476524",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Laser Applications in Life Sciences",
address = "United States",

}

Cheng, M, Hiltunen, J, Wang, M, Suutala, A, Karioja, P & Myllylä, R 2010, Fabrication of polymer waveguide devices for sensor applications. in Laser Applications in Life Sciences., 73761A, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 7376, Laser Applications in Life Sciences 2010, Oulu, Finland, 9/06/10. https://doi.org/10.1117/12.871119

Fabrication of polymer waveguide devices for sensor applications. / Cheng, Mu; Hiltunen, Jussi; Wang, Meng; Suutala, Antti; Karioja, Pentti; Myllylä, Risto.

Laser Applications in Life Sciences. International Society for Optics and Photonics SPIE, 2010. 73761A (Proceedings of SPIE, Vol. 7376).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Fabrication of polymer waveguide devices for sensor applications

AU - Cheng, Mu

AU - Hiltunen, Jussi

AU - Wang, Meng

AU - Suutala, Antti

AU - Karioja, Pentti

AU - Myllylä, Risto

PY - 2010

Y1 - 2010

N2 - The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.

AB - The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.

U2 - 10.1117/12.871119

DO - 10.1117/12.871119

M3 - Conference article in proceedings

SN - 9780819476524

T3 - Proceedings of SPIE

BT - Laser Applications in Life Sciences

PB - International Society for Optics and Photonics SPIE

ER -

Cheng M, Hiltunen J, Wang M, Suutala A, Karioja P, Myllylä R. Fabrication of polymer waveguide devices for sensor applications. In Laser Applications in Life Sciences. International Society for Optics and Photonics SPIE. 2010. 73761A. (Proceedings of SPIE, Vol. 7376). https://doi.org/10.1117/12.871119