Fabrication of polymer waveguide devices for sensor applications

Mu Cheng, Jussi Hiltunen, Meng Wang, Antti Suutala, Pentti Karioja, Risto Myllylä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.
    Original languageEnglish
    Title of host publicationLaser Applications in Life Sciences
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)9780819476524
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    EventLaser Applications in Life Sciences 2010 - Oulu, Finland
    Duration: 9 Jun 201011 Jun 2010

    Publication series

    SeriesProceedings of SPIE
    Volume7376

    Conference

    ConferenceLaser Applications in Life Sciences 2010
    Country/TerritoryFinland
    CityOulu
    Period9/06/1011/06/10

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