Fabrication of polymer waveguide devices for sensor applications

Mu Cheng, Jussi Hiltunen, Meng Wang, Antti Suutala, Pentti Karioja, Risto Myllylä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.
Original languageEnglish
Title of host publicationLaser Applications in Life Sciences
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)9780819476524
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventLaser Applications in Life Sciences 2010 - Oulu, Finland
Duration: 9 Jun 201011 Jun 2010

Publication series

SeriesProceedings of SPIE
Volume7376

Conference

ConferenceLaser Applications in Life Sciences 2010
CountryFinland
CityOulu
Period9/06/1011/06/10

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  • Cite this

    Cheng, M., Hiltunen, J., Wang, M., Suutala, A., Karioja, P., & Myllylä, R. (2010). Fabrication of polymer waveguide devices for sensor applications. In Laser Applications in Life Sciences [73761A] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 7376 https://doi.org/10.1117/12.871119