Fabrication of polymer waveguide devices for sensor applications

Mu Cheng, Jussi Hiltunen, Meng Wang, Antti Suutala, Pentti Karioja, Risto Myllylä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)


    The fabrication of polymer based waveguide devices by different methods is investigated in this work including lithographic, imprinting and focused-ion-beam processing. Also, the combination of luminescent substance with waveguide is evaluated to produce integrated optical micro system including both the light source and sensor structure on a single platform.
    Original languageEnglish
    Title of host publicationLaser Applications in Life Sciences
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)9780819476524
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    EventLaser Applications in Life Sciences 2010 - Oulu, Finland
    Duration: 9 Jun 201011 Jun 2010

    Publication series

    SeriesProceedings of SPIE


    ConferenceLaser Applications in Life Sciences 2010


    Dive into the research topics of 'Fabrication of polymer waveguide devices for sensor applications'. Together they form a unique fingerprint.

    Cite this