Fabrication of silicon nanostructures for photonic crystal applications

Sanna Yliniemi, Janne Simonen, Timo Aalto, Päivi Heimala

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationConference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
    Subtitle of host publicationEspoo, FI , 10 - 12 June 2002
    Place of PublicationLondon,UK
    PublisherIOM Communications Ltd.
    Pages105-108
    ISBN (Print)1-86125-155-6
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication
    Event4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland
    Duration: 10 Jun 200212 Jun 2002

    Conference

    Conference4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
    CountryFinland
    CityEspoo
    Period10/06/0212/06/02

    Keywords

    • photonic crystals
    • inductively coupled plasma etching
    • ICP
    • silicon
    • fabrication

    Cite this

    Yliniemi, S., Simonen, J., Aalto, T., & Heimala, P. (2002). Fabrication of silicon nanostructures for photonic crystal applications. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002 (pp. 105-108). London,UK: IOM Communications Ltd..
    Yliniemi, Sanna ; Simonen, Janne ; Aalto, Timo ; Heimala, Päivi. / Fabrication of silicon nanostructures for photonic crystal applications. Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London,UK : IOM Communications Ltd., 2002. pp. 105-108
    @inproceedings{95fed0f9d77247c5ae89930fa06da51e,
    title = "Fabrication of silicon nanostructures for photonic crystal applications",
    keywords = "photonic crystals, inductively coupled plasma etching, ICP, silicon, fabrication",
    author = "Sanna Yliniemi and Janne Simonen and Timo Aalto and P{\"a}ivi Heimala",
    year = "2002",
    language = "English",
    isbn = "1-86125-155-6",
    pages = "105--108",
    booktitle = "Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002",
    publisher = "IOM Communications Ltd.",
    address = "United Kingdom",

    }

    Yliniemi, S, Simonen, J, Aalto, T & Heimala, P 2002, Fabrication of silicon nanostructures for photonic crystal applications. in Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. IOM Communications Ltd., London,UK, pp. 105-108, 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002, Espoo, Finland, 10/06/02.

    Fabrication of silicon nanostructures for photonic crystal applications. / Yliniemi, Sanna; Simonen, Janne; Aalto, Timo; Heimala, Päivi.

    Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London,UK : IOM Communications Ltd., 2002. p. 105-108.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Fabrication of silicon nanostructures for photonic crystal applications

    AU - Yliniemi, Sanna

    AU - Simonen, Janne

    AU - Aalto, Timo

    AU - Heimala, Päivi

    PY - 2002

    Y1 - 2002

    KW - photonic crystals

    KW - inductively coupled plasma etching

    KW - ICP

    KW - silicon

    KW - fabrication

    M3 - Conference article in proceedings

    SN - 1-86125-155-6

    SP - 105

    EP - 108

    BT - Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

    PB - IOM Communications Ltd.

    CY - London,UK

    ER -

    Yliniemi S, Simonen J, Aalto T, Heimala P. Fabrication of silicon nanostructures for photonic crystal applications. In Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London,UK: IOM Communications Ltd. 2002. p. 105-108