Fabrication of silicon nanostructures for photonic crystal applications

Sanna Yliniemi; Janne Simonen; Timo Aalto; Päivi Heimala

Fabrication of silicon nanostructures for photonic crystal applications

Sanna Yliniemi, Janne Simonen, Timo Aalto, Päivi Heimala

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Subtitle of host publication	Espoo, FI , 10 - 12 June 2002
Place of Publication	London,UK
Publisher	IOM Communications Ltd.
Pages	105-108
ISBN (Print)	1-86125-155-6
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication
Event	4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 - Espoo, Finland Duration: 10 Jun 2002 → 12 Jun 2002

Conference

Conference	4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002
Country/Territory	Finland
City	Espoo
Period	10/06/02 → 12/06/02

Keywords

photonic crystals
inductively coupled plasma etching
ICP
silicon
fabrication

Cite this

@inproceedings{95fed0f9d77247c5ae89930fa06da51e,

title = "Fabrication of silicon nanostructures for photonic crystal applications",

keywords = "photonic crystals, inductively coupled plasma etching, ICP, silicon, fabrication",

author = "Sanna Yliniemi and Janne Simonen and Timo Aalto and P{\"a}ivi Heimala",

year = "2002",

language = "English",

isbn = "1-86125-155-6",

pages = "105--108",

booktitle = "Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002",

publisher = "IOM Communications Ltd.",

address = "United Kingdom",

note = "4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002 ; Conference date: 10-06-2002 Through 12-06-2002",

}

Yliniemi, S, Simonen, J, Aalto, T & Heimala, P 2002, Fabrication of silicon nanostructures for photonic crystal applications. in Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. IOM Communications Ltd., London,UK, pp. 105-108, 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002, Espoo, Finland, 10/06/02.

Fabrication of silicon nanostructures for photonic crystal applications. / Yliniemi, Sanna; Simonen, Janne; Aalto, Timo et al.
Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002: Espoo, FI , 10 - 12 June 2002. London,UK: IOM Communications Ltd., 2002. p. 105-108.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Fabrication of silicon nanostructures for photonic crystal applications

AU - Yliniemi, Sanna

AU - Simonen, Janne

AU - Aalto, Timo

AU - Heimala, Päivi

PY - 2002

Y1 - 2002

KW - photonic crystals

KW - inductively coupled plasma etching

KW - ICP

KW - silicon

KW - fabrication

M3 - Conference article in proceedings

SN - 1-86125-155-6

SP - 105

EP - 108

BT - Conference Papers 2002. 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

PB - IOM Communications Ltd.

CY - London,UK

T2 - 4th International Conference on Materials for Microelectronics and Nanoengineering, MFMN 2002

Y2 - 10 June 2002 through 12 June 2002

ER -