@inproceedings{f14cd4b1a3cd41e6962e509f7459e3ed,
title = "Fabrication of single crystal silicon resonators with narrow gaps",
author = "Jyrki Kiiham{\"a}ki and Ville Kaajakari and Hannu Luoto and Hannu Kattelus and Marko Ylikoski",
year = "2005",
doi = "10.1109/SENSOR.2005.1497332",
language = "English",
isbn = "0-7803-8994-8",
pages = "1354--1357",
booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}