Fabrication of single crystal silicon resonators with narrow gaps

Jyrki Kiihamäki, Ville Kaajakari, Hannu Luoto, Hannu Kattelus, Marko Ylikoski

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1354-1357
ISBN (Electronic)0-7803-8995-6
ISBN (Print)0-7803-8994-8
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
Event13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

Conference13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated titleTRANSDUCERS '05
Country/TerritoryKorea, Republic of
CitySeoul
Period5/06/059/06/05

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