Fabrication of single crystal silicon resonators with narrow gaps

Jyrki Kiihamäki, Ville Kaajakari, Hannu Luoto, Hannu Kattelus, Marko Ylikoski

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1354-1357
ISBN (Electronic)0-7803-8995-6
ISBN (Print)0-7803-8994-8
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

ConferenceThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated titleTRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Cite this

Kiihamäki, J., Kaajakari, V., Luoto, H., Kattelus, H., & Ylikoski, M. (2005). Fabrication of single crystal silicon resonators with narrow gaps. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05 (pp. 1354-1357). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/SENSOR.2005.1497332