Fabrication of single crystal silicon resonators with narrow gaps

Jyrki Kiihamäki; Ville Kaajakari; Hannu Luoto; Hannu Kattelus; Marko Ylikoski

doi:10.1109/SENSOR.2005.1497332

Fabrication of single crystal silicon resonators with narrow gaps

Jyrki Kiihamäki, Ville Kaajakari, Hannu Luoto, Hannu Kattelus, Marko Ylikoski

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

11 Citations (Scopus)

Original language	English
Title of host publication	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1354-1357
ISBN (Electronic)	0-7803-8995-6
ISBN (Print)	0-7803-8994-8
DOIs	https://doi.org/10.1109/SENSOR.2005.1497332
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Conference

Conference	13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated title	TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Access to Document

10.1109/SENSOR.2005.1497332

Cite this

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title = "Fabrication of single crystal silicon resonators with narrow gaps",

author = "Jyrki Kiiham{\"a}ki and Ville Kaajakari and Hannu Luoto and Hannu Kattelus and Marko Ylikoski",

year = "2005",

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language = "English",

isbn = "0-7803-8994-8",

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booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

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Kiihamäki, J, Kaajakari, V, Luoto, H, Kattelus, H & Ylikoski, M 2005, Fabrication of single crystal silicon resonators with narrow gaps. in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05. IEEE Institute of Electrical and Electronic Engineers, pp. 1354-1357, 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1497332

Fabrication of single crystal silicon resonators with narrow gaps. / Kiihamäki, Jyrki; Kaajakari, Ville; Luoto, Hannu; Kattelus, Hannu; Ylikoski, Marko.

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05. IEEE Institute of Electrical and Electronic Engineers, 2005. p. 1354-1357.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Fabrication of single crystal silicon resonators with narrow gaps

AU - Kiihamäki, Jyrki

AU - Kaajakari, Ville

AU - Luoto, Hannu

AU - Kattelus, Hannu

AU - Ylikoski, Marko

PY - 2005

Y1 - 2005

U2 - 10.1109/SENSOR.2005.1497332

DO - 10.1109/SENSOR.2005.1497332

M3 - Conference article in proceedings

SN - 0-7803-8994-8

SP - 1354

EP - 1357

BT - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -