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Fabrication of SOI micromechanical devices: Dissertation
Jyrki Kiihamäki
BA14 Sensing and integration
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Dissertation
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Physics & Astronomy
insulators
fabrication
silicon
etching
micromechanics
integrated circuits
aspect ratio
resonators
flow resistance
single crystals
sensors
cavities
clocks
Q factors
quartz
masks
prototypes
wafers
microscopy
vacuum
oxides