Ohutkalvotyhjöpakkauksella suojattujen pintamikromekaanisten rakenteiden valmistus: Lisensiaatintyö

Translated title of the contribution: Fabrication of surface micromechanical structures with thin film vacuum encapsulation: Licenciate thesis

Antti Lipsanen

Research output: ThesisLicenciateTheses

Translated title of the contributionFabrication of surface micromechanical structures with thin film vacuum encapsulation: Licenciate thesis
Original languageFinnish
QualificationLicentiate Degree
Publication statusPublished - 2004
MoE publication typeG3 Licentiate thesis

Keywords

  • micromechanics
  • MEMS
  • wafer level packaging
  • fabrication process
  • fabrication
  • polycrystalline silicon
  • vacuum encapsulation

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