Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography

Tomi Haatainen; Päivi Majander; Tapio Mäkelä; Jouni Ahopelto; Kawaguchi Yasuhide

Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Kawaguchi Yasuhide

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	EIPBN Abstracts Archive
Number of pages	2
Publication status	Published - 2007
MoE publication type	Not Eligible
Event	51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007 - Denver, United States Duration: 29 May 2007 → 1 Jun 2007

Conference

Conference	51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007
Country/Territory	United States
City	Denver
Period	29/05/07 → 1/06/07

Access to Document

https://eipbn.omnibooksonline.com/data/papers/2007/PI-4.pdf#page=1

Cite this

@inbook{9719823e93074a169d64bea88b6d69fb,

title = "Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography",

author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto and Kawaguchi Yasuhide",

note = "CO:U Asahi Glass Co. Ltd CA2: TK601 Project code: NAPARAI; 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007 ; Conference date: 29-05-2007 Through 01-06-2007",

year = "2007",

language = "English",

booktitle = "EIPBN Abstracts Archive",

}

Haatainen, T, Majander, P, Mäkelä, T , Ahopelto, J & Yasuhide, K 2007, Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography. in EIPBN Abstracts Archive . 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007, Denver, United States, 29/05/07. <https://eipbn.omnibooksonline.com/data/papers/2007/PI-4.pdf#page=1>

TY - CHAP

T1 - Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

AU - Yasuhide, Kawaguchi

N1 - CO:U Asahi Glass Co. Ltd CA2: TK601 Project code: NAPARAI

PY - 2007

Y1 - 2007

M3 - Conference abstract in proceedings

BT - EIPBN Abstracts Archive

T2 - 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007

Y2 - 29 May 2007 through 1 June 2007

ER -