Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Kawaguchi Yasuhide

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationEIPBN Abstracts Archive
Number of pages2
Publication statusPublished - 2007
MoE publication typeNot Eligible
Event51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007 - Denver, United States
Duration: 29 May 20071 Jun 2007

Conference

Conference51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007
CountryUnited States
CityDenver
Period29/05/071/06/07

Cite this

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title = "Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography",
author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto and Kawaguchi Yasuhide",
note = "CO:U Asahi Glass Co. Ltd CA2: TK601 Project code: NAPARAI",
year = "2007",
language = "English",
booktitle = "EIPBN Abstracts Archive",

}

Haatainen, T, Majander, P, Mäkelä, T, Ahopelto, J & Yasuhide, K 2007, Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography. in EIPBN Abstracts Archive . 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007, Denver, United States, 29/05/07.

Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography. / Haatainen, Tomi; Majander, Päivi; Mäkelä, Tapio; Ahopelto, Jouni; Yasuhide, Kawaguchi.

EIPBN Abstracts Archive . 2007.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

AU - Yasuhide, Kawaguchi

N1 - CO:U Asahi Glass Co. Ltd CA2: TK601 Project code: NAPARAI

PY - 2007

Y1 - 2007

M3 - Conference abstract in proceedings

BT - EIPBN Abstracts Archive

ER -