@inbook{9719823e93074a169d64bea88b6d69fb,
title = "Fabrication of UV-NIL polymer stamps using step and stamp imprint lithography",
author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto and Kawaguchi Yasuhide",
note = "CO:U Asahi Glass Co. Ltd CA2: TK601 Project code: NAPARAI; 51st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2007 ; Conference date: 29-05-2007 Through 01-06-2007",
year = "2007",
language = "English",
booktitle = "EIPBN Abstracts Archive",
}