Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography

Tomi Haatainen; Päivi Majander; Tapio Mäkelä; Jouni Ahopelto; Yasuhide  Kawaguchi

Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Yasuhide Kawaguchi

Asahi Glass Co., Ltd.

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2007
MoE publication type	Not Eligible
Event	6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07 - Paris, France Duration: 10 Oct 2007 → 12 Oct 2007

Conference

Conference	6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07
Abbreviated title	NNT 2007
Country/Territory	France
City	Paris
Period	10/10/07 → 12/10/07

Cite this

@conference{eb90f2d203724699ab87e5863a0dde7a,

title = "Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography",

author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto and Yasuhide Kawaguchi",

note = "Project code: 1231; 6th International Conference on Nanoprint and Nanoimprint Technology, NNT{\textquoteright}07, NNT 2007 ; Conference date: 10-10-2007 Through 12-10-2007",

year = "2007",

language = "English",

}

TY - CONF

T1 - Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

AU - Kawaguchi, Yasuhide

N1 - Project code: 1231

PY - 2007

Y1 - 2007

M3 - Conference article

T2 - 6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07

Y2 - 10 October 2007 through 12 October 2007

ER -