Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Yasuhide Kawaguchi

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2007
    MoE publication typeNot Eligible
    Event6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07 - Paris, France
    Duration: 10 Oct 200712 Oct 2007

    Conference

    Conference6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07
    Abbreviated titleNNT 2007
    CountryFrance
    CityParis
    Period10/10/0712/10/07

    Cite this