Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Yasuhide Kawaguchi

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2007
MoE publication typeNot Eligible
Event6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07 - Paris, France
Duration: 10 Oct 200712 Oct 2007

Conference

Conference6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07
Abbreviated titleNNT 2007
CountryFrance
CityParis
Period10/10/0712/10/07

Cite this

Haatainen, T., Majander, P., Mäkelä, T., Ahopelto, J., & Kawaguchi, Y. (2007). Fabrication of wafer size UV-nil stamp by step and stamp imprint lithography. Paper presented at 6th International Conference on Nanoprint and Nanoimprint Technology, NNT’07, Paris, France.