Fabrication process for DC-SQUIDs based on Nb/AI-AIOx/Nb Josephson junctions

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publicationProceedings of the 15th Nordic Semiconductor Meeting, Hämeenlinna, Finland
    EditorsSami Franssyla, Riitta Paananen
    Pages19-22
    Publication statusPublished - 1992
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event15th Nordic Semiconductor Meeting - Hämeenlinna, Finland
    Duration: 9 Jun 199211 Jun 1992
    Conference number: 15

    Conference

    Conference15th Nordic Semiconductor Meeting
    CountryFinland
    CityHämeenlinna
    Period9/06/9211/06/92

    Keywords

    • Josephson junction

    Cite this

    Grönberg, L., Kiviranta, M., Salmi, J., & Seppä, H. (1992). Fabrication process for DC-SQUIDs based on Nb/AI-AIOx/Nb Josephson junctions. In S. Franssyla, & R. Paananen (Eds.), Proceedings of the 15th Nordic Semiconductor Meeting, Hämeenlinna, Finland (pp. 19-22)