Fabry-Perot interferometer and a method for producing the same

Jyrki Ollila (Inventor), Tapani Antila (Inventor), Heikki Saari (Inventor), Jussi Mäkynen (Inventor), Christer Holmlund (Inventor), Jarkko Antila (Inventor)

Research output: PatentPatent


The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

Patent family as of 19.10.2021
CN104428642 A 20150318 CN201380036359 20130508      
CN104428642 B 20170308 CN201380036359 20130508      
EP2847559 A1 20150318 EP20130787582 20130508      
EP2847559 A4 20160106 EP20130787582 20130508      
FI125612 B 20151215 FI20120005495 20120508      
FI20125495 A 20131109 FI20120005495 20120508      
JP2015520868 T2 20150723 JP20150510850T 20130508      
JP6214631 B2 20171018 JP20150510850T 20130508      
US2015124263 AA 20150507 US20130399956 20130508      
US9588334 BB 20170307 US20130399956 20130508      
WO13167811 A1 20131114 WO2013FI50510 20130508

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Original languageEnglish
Patent numberUS2015124263
IPCG01B 9/ 02 A I
Priority date8/05/13
Publication statusPublished - 7 May 2015
MoE publication typeH1 Granted patent


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