Fabry-Perot interferometer and a method for producing the same

Jyrki Ollila (Inventor), Tapani Antila (Inventor), Heikki Saari (Inventor), Jussi Mäkynen (Inventor), Christer Holmlund (Inventor), Jarkko Antila (Inventor)

    Research output: PatentPatent

    Abstract

    The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

    Patent family as of 19.10.2021
    CN104428642 A 20150318 CN201380036359 20130508      
    CN104428642 B 20170308 CN201380036359 20130508      
    EP2847559 A1 20150318 EP20130787582 20130508      
    EP2847559 A4 20160106 EP20130787582 20130508      
    FI125612 B 20151215 FI20120005495 20120508      
    FI20125495 A 20131109 FI20120005495 20120508      
    JP2015520868 T2 20150723 JP20150510850T 20130508      
    JP6214631 B2 20171018 JP20150510850T 20130508      
    US2015124263 AA 20150507 US20130399956 20130508      
    US9588334 BB 20170307 US20130399956 20130508      
    WO13167811 A1 20131114 WO2013FI50510 20130508

    Link to current patent family on right 

    Original languageEnglish
    Patent numberUS2015124263
    IPCG01B 9/ 02 A I
    Priority date8/05/13
    Publication statusPublished - 7 May 2015
    MoE publication typeH1 Granted patent

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