Abstract
The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.
Patent family as of 19.10.2021
CN104428642 A 20150318 CN201380036359 20130508
CN104428642 B 20170308 CN201380036359 20130508
EP2847559 A1 20150318 EP20130787582 20130508
EP2847559 A4 20160106 EP20130787582 20130508
FI125612 B 20151215 FI20120005495 20120508
FI20125495 A 20131109 FI20120005495 20120508
JP2015520868 T2 20150723 JP20150510850T 20130508
JP6214631 B2 20171018 JP20150510850T 20130508
US2015124263 AA 20150507 US20130399956 20130508
US9588334 BB 20170307 US20130399956 20130508
WO13167811 A1 20131114 WO2013FI50510 20130508
Link to current patent family on right
| Original language | English |
|---|---|
| Patent number | US2015124263 |
| IPC | G01B 9/ 02 A I |
| Priority date | 8/05/13 |
| Publication status | Published - 7 May 2015 |
| MoE publication type | H1 Granted patent |