Fabry-perot interferometer having supporting elements

Christer Holmlund; Aki Keskisaari; Ingmar Stuns; Hans Toivanen

Fabry-perot interferometer having supporting elements

Christer Holmlund (Inventor)
, Aki Keskisaari (Inventor)
, Ingmar Stuns (Inventor)
, Hans Toivanen (Inventor)

BA6312 Microspectrometers

Research output: Patent › Patent

Abstract

A Fabry-Perot interferometer includes a first mirror plate with a first semi-transparent mirror, a second semi-transparent mirror to define an optical cavity together with the first mirror, and one or more first supporting elements to support the first mirror plate, wherein the first mirror plate has a first substantially planar surface and a second substantially planar surface defining the maximum thickness of the first mirror plate, wherein the first mirror plate is bonded to the one or more first supporting elements by three or more joints,wherein each joint is bonded to the first mirror plate at a bonding region,wherein the distance between each bonding region and the first substantially planar surface is greater than 30 percent of the thickness of the mirror plate, and the distance between each bonding region and the second substantially planar surface is greater than 30 percent of the thickness of the mirror plate.

Patent family as of 21.7.2026
DE602021031419 D1, EP4127623 A1, EP4127623 B1, EP4127623 C0, FI130707 B, FI20205318 A, PL4127623 T3, US12209905 BB, US2023152154 AA, WO21198562 A1

Original language	English
Patent number	EP4127623 B1
IPC	G01J3/02
Priority date	31/03/20
Filing date	30/03/21
Publication status	Published - 28 May 2025
MoE publication type	H1 Granted patent

Cite this

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title = "Fabry-perot interferometer having supporting elements",

abstract = "A Fabry-Perot interferometer includes a first mirror plate with a first semi-transparent mirror, a second semi-transparent mirror to define an optical cavity together with the first mirror, and one or more first supporting elements to support the first mirror plate, wherein the first mirror plate has a first substantially planar surface and a second substantially planar surface defining the maximum thickness of the first mirror plate, wherein the first mirror plate is bonded to the one or more first supporting elements by three or more joints,wherein each joint is bonded to the first mirror plate at a bonding region,wherein the distance between each bonding region and the first substantially planar surface is greater than 30 percent of the thickness of the mirror plate, and the distance between each bonding region and the second substantially planar surface is greater than 30 percent of the thickness of the mirror plate. Patent family as of 21.7.2026 DE602021031419 D1, EP4127623 A1, EP4127623 B1, EP4127623 C0, FI130707 B, FI20205318 A, PL4127623 T3, US12209905 BB, US2023152154 AA, WO21198562 A1",

author = "Christer Holmlund and Aki Keskisaari and Ingmar Stuns and Hans Toivanen",

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T1 - Fabry-perot interferometer having supporting elements

AU - Holmlund, Christer

AU - Keskisaari, Aki

AU - Stuns, Ingmar

AU - Toivanen, Hans

PY - 2025/5/28

Y1 - 2025/5/28

N2 - A Fabry-Perot interferometer includes a first mirror plate with a first semi-transparent mirror, a second semi-transparent mirror to define an optical cavity together with the first mirror, and one or more first supporting elements to support the first mirror plate, wherein the first mirror plate has a first substantially planar surface and a second substantially planar surface defining the maximum thickness of the first mirror plate, wherein the first mirror plate is bonded to the one or more first supporting elements by three or more joints,wherein each joint is bonded to the first mirror plate at a bonding region,wherein the distance between each bonding region and the first substantially planar surface is greater than 30 percent of the thickness of the mirror plate, and the distance between each bonding region and the second substantially planar surface is greater than 30 percent of the thickness of the mirror plate. Patent family as of 21.7.2026 DE602021031419 D1, EP4127623 A1, EP4127623 B1, EP4127623 C0, FI130707 B, FI20205318 A, PL4127623 T3, US12209905 BB, US2023152154 AA, WO21198562 A1

AB - A Fabry-Perot interferometer includes a first mirror plate with a first semi-transparent mirror, a second semi-transparent mirror to define an optical cavity together with the first mirror, and one or more first supporting elements to support the first mirror plate, wherein the first mirror plate has a first substantially planar surface and a second substantially planar surface defining the maximum thickness of the first mirror plate, wherein the first mirror plate is bonded to the one or more first supporting elements by three or more joints,wherein each joint is bonded to the first mirror plate at a bonding region,wherein the distance between each bonding region and the first substantially planar surface is greater than 30 percent of the thickness of the mirror plate, and the distance between each bonding region and the second substantially planar surface is greater than 30 percent of the thickness of the mirror plate. Patent family as of 21.7.2026 DE602021031419 D1, EP4127623 A1, EP4127623 B1, EP4127623 C0, FI130707 B, FI20205318 A, PL4127623 T3, US12209905 BB, US2023152154 AA, WO21198562 A1

UR - https://fi.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=fi_FI&FT=D&date=20230518&CC=US&NR=2023152154A1&KC=A1

M3 - Patent

M1 - EP4127623 B1

Y2 - 2021/03/30

ER -

Fabry-perot interferometer having supporting elements

Abstract

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