Factors affecting the sensitivity of electrostatic ultrasonic transducers

Jarmo Hietanen, Pentti Mattila, Jyrki Stor-Pellinen, Fabio Tsuzuki, Heli Väätäjä, Ken Sasaki, Mauri Luukkala

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)


The sensitivity of an electrostatic transducer determines the range of pulse-echo detection. Maximum sensitivity can be achieved by increasing the bias voltage within certain limits and by using a light membrane. The tension of the membrane was not found to affect the transducer's sensitivity. By using a uniformly grooved backplate the acoustic properties of the transducer can be optimized. The different sensitivity factors of the electrostatic ultrasonic transducer were confirmed with experimental results. High sensitivity can be achieved by using well manufactured backplates with shallow grooves and a small ridge angle.
Original languageEnglish
Pages (from-to)1138-1142
JournalMeasurement Science and Technology
Issue number10
Publication statusPublished - 1993
MoE publication typeA1 Journal article-refereed


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