Factors affecting the sensitivity of electrostatic ultrasonic transducers

Jarmo Hietanen, Pentti Mattila, Jyrki Stor-Pellinen, Fabio Tsuzuki, Heli Väätäjä, Ken Sasaki, Mauri Luukkala

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)

Abstract

The sensitivity of an electrostatic transducer determines the range of pulse-echo detection. Maximum sensitivity can be achieved by increasing the bias voltage within certain limits and by using a light membrane. The tension of the membrane was not found to affect the transducer's sensitivity. By using a uniformly grooved backplate the acoustic properties of the transducer can be optimized. The different sensitivity factors of the electrostatic ultrasonic transducer were confirmed with experimental results. High sensitivity can be achieved by using well manufactured backplates with shallow grooves and a small ridge angle.

Original languageEnglish
Pages (from-to)1138 - 1142
Number of pages5
JournalMeasurement Science and Technology
Volume4
Issue number10
DOIs
Publication statusPublished - 1993
MoE publication typeA1 Journal article-refereed

Fingerprint

Ultrasonic transducers
Transducer
Electrostatics
Transducers
transducers
ultrasonics
electrostatics
sensitivity
Membranes
Acoustic properties
Bias voltage
Membrane
membranes
acoustic properties
Ridge
grooves
ridges
echoes
Acoustics
Voltage

Cite this

Hietanen, J., Mattila, P., Stor-Pellinen, J., Tsuzuki, F., Väätäjä, H., Sasaki, K., & Luukkala, M. (1993). Factors affecting the sensitivity of electrostatic ultrasonic transducers. Measurement Science and Technology, 4(10), 1138 - 1142. https://doi.org/10.1088/0957-0233/4/10/018
Hietanen, Jarmo ; Mattila, Pentti ; Stor-Pellinen, Jyrki ; Tsuzuki, Fabio ; Väätäjä, Heli ; Sasaki, Ken ; Luukkala, Mauri. / Factors affecting the sensitivity of electrostatic ultrasonic transducers. In: Measurement Science and Technology. 1993 ; Vol. 4, No. 10. pp. 1138 - 1142.
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Hietanen, J, Mattila, P, Stor-Pellinen, J, Tsuzuki, F, Väätäjä, H, Sasaki, K & Luukkala, M 1993, 'Factors affecting the sensitivity of electrostatic ultrasonic transducers', Measurement Science and Technology, vol. 4, no. 10, pp. 1138 - 1142. https://doi.org/10.1088/0957-0233/4/10/018

Factors affecting the sensitivity of electrostatic ultrasonic transducers. / Hietanen, Jarmo; Mattila, Pentti; Stor-Pellinen, Jyrki; Tsuzuki, Fabio; Väätäjä, Heli; Sasaki, Ken; Luukkala, Mauri.

In: Measurement Science and Technology, Vol. 4, No. 10, 1993, p. 1138 - 1142.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Hietanen, Jarmo

AU - Mattila, Pentti

AU - Stor-Pellinen, Jyrki

AU - Tsuzuki, Fabio

AU - Väätäjä, Heli

AU - Sasaki, Ken

AU - Luukkala, Mauri

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AB - The sensitivity of an electrostatic transducer determines the range of pulse-echo detection. Maximum sensitivity can be achieved by increasing the bias voltage within certain limits and by using a light membrane. The tension of the membrane was not found to affect the transducer's sensitivity. By using a uniformly grooved backplate the acoustic properties of the transducer can be optimized. The different sensitivity factors of the electrostatic ultrasonic transducer were confirmed with experimental results. High sensitivity can be achieved by using well manufactured backplates with shallow grooves and a small ridge angle.

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DO - 10.1088/0957-0233/4/10/018

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JF - Measurement Science and Technology

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Hietanen J, Mattila P, Stor-Pellinen J, Tsuzuki F, Väätäjä H, Sasaki K et al. Factors affecting the sensitivity of electrostatic ultrasonic transducers. Measurement Science and Technology. 1993;4(10):1138 - 1142. https://doi.org/10.1088/0957-0233/4/10/018