Fast micromachining using spatial light modulator and galvanometer scanner with infrared pulsed nanosecond fiber laser

Jarno Kaakkunen (Corresponding Author), Ilkka Vanttaja, Petri Laakso

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Abstract

Rapid method to fabricate microstructures using a combination of a spatial light modulator (SLM) and a galvanometer scanner with an infrared nanosecond fiber lasers is studied. Here the SLM is used as a computer generated hologram which can be applied to modify laser pulses intensity distribution virtually almost arbitrary. SLM is used to separate nanosecond pulses into the several spots so that multiple spots can be machined simultaneously with a fast ablation rate. In this paper it is shown that the micromachining speeds that can be realized using a combination of the SLM and the scanner, are not always possible to realize using merely scanner. It is shown that about 0.6 million spots per second can be ablated in silicon using this combination.
Original languageEnglish
Pages (from-to)37-41
JournalJournal of Laser Micro Nanoengineering
Volume9
Issue number1
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event6th International Congress on Laser Advanced Materials Processing, LAMP 2013 - Niigata, Japan
Duration: 23 Jul 201326 Jul 2013

Fingerprint

Galvanometers
galvanometers
Micromachining
micromachining
light modulators
Fiber lasers
Pulsed lasers
scanners
fiber lasers
pulsed lasers
Infrared radiation
Infrared lasers
Holograms
Ablation
pulses
infrared lasers
ablation
Laser pulses
Silicon
microstructure

Keywords

  • nanosecond laser
  • spatial light modulator
  • computer generated hologram
  • laser marking
  • microstructures

Cite this

@article{42b8c42c2634471d9d0a0ea1d567988b,
title = "Fast micromachining using spatial light modulator and galvanometer scanner with infrared pulsed nanosecond fiber laser",
abstract = "Rapid method to fabricate microstructures using a combination of a spatial light modulator (SLM) and a galvanometer scanner with an infrared nanosecond fiber lasers is studied. Here the SLM is used as a computer generated hologram which can be applied to modify laser pulses intensity distribution virtually almost arbitrary. SLM is used to separate nanosecond pulses into the several spots so that multiple spots can be machined simultaneously with a fast ablation rate. In this paper it is shown that the micromachining speeds that can be realized using a combination of the SLM and the scanner, are not always possible to realize using merely scanner. It is shown that about 0.6 million spots per second can be ablated in silicon using this combination.",
keywords = "nanosecond laser, spatial light modulator, computer generated hologram, laser marking, microstructures",
author = "Jarno Kaakkunen and Ilkka Vanttaja and Petri Laakso",
note = "Project code: 74520",
year = "2013",
doi = "10.2961/jlmn.2014.01.0008",
language = "English",
volume = "9",
pages = "37--41",
journal = "Journal of Laser Micro Nanoengineering",
issn = "1880-0688",
publisher = "Japan Laser Processing",
number = "1",

}

Fast micromachining using spatial light modulator and galvanometer scanner with infrared pulsed nanosecond fiber laser. / Kaakkunen, Jarno (Corresponding Author); Vanttaja, Ilkka; Laakso, Petri.

In: Journal of Laser Micro Nanoengineering, Vol. 9, No. 1, 2013, p. 37-41.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Fast micromachining using spatial light modulator and galvanometer scanner with infrared pulsed nanosecond fiber laser

AU - Kaakkunen, Jarno

AU - Vanttaja, Ilkka

AU - Laakso, Petri

N1 - Project code: 74520

PY - 2013

Y1 - 2013

N2 - Rapid method to fabricate microstructures using a combination of a spatial light modulator (SLM) and a galvanometer scanner with an infrared nanosecond fiber lasers is studied. Here the SLM is used as a computer generated hologram which can be applied to modify laser pulses intensity distribution virtually almost arbitrary. SLM is used to separate nanosecond pulses into the several spots so that multiple spots can be machined simultaneously with a fast ablation rate. In this paper it is shown that the micromachining speeds that can be realized using a combination of the SLM and the scanner, are not always possible to realize using merely scanner. It is shown that about 0.6 million spots per second can be ablated in silicon using this combination.

AB - Rapid method to fabricate microstructures using a combination of a spatial light modulator (SLM) and a galvanometer scanner with an infrared nanosecond fiber lasers is studied. Here the SLM is used as a computer generated hologram which can be applied to modify laser pulses intensity distribution virtually almost arbitrary. SLM is used to separate nanosecond pulses into the several spots so that multiple spots can be machined simultaneously with a fast ablation rate. In this paper it is shown that the micromachining speeds that can be realized using a combination of the SLM and the scanner, are not always possible to realize using merely scanner. It is shown that about 0.6 million spots per second can be ablated in silicon using this combination.

KW - nanosecond laser

KW - spatial light modulator

KW - computer generated hologram

KW - laser marking

KW - microstructures

U2 - 10.2961/jlmn.2014.01.0008

DO - 10.2961/jlmn.2014.01.0008

M3 - Article

VL - 9

SP - 37

EP - 41

JO - Journal of Laser Micro Nanoengineering

JF - Journal of Laser Micro Nanoengineering

SN - 1880-0688

IS - 1

ER -