Fast micromachining using spatial light modulator and galvanometer scanner with infrared pulsed nanosecond fiber laser

Jarno Kaakkunen (Corresponding Author), Ilkka Vanttaja, Petri Laakso

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)


Rapid method to fabricate microstructures using a combination of a spatial light modulator (SLM) and a galvanometer scanner with an infrared nanosecond fiber lasers is studied. Here the SLM is used as a computer generated hologram which can be applied to modify laser pulses intensity distribution virtually almost arbitrary. SLM is used to separate nanosecond pulses into the several spots so that multiple spots can be machined simultaneously with a fast ablation rate. In this paper it is shown that the micromachining speeds that can be realized using a combination of the SLM and the scanner, are not always possible to realize using merely scanner. It is shown that about 0.6 million spots per second can be ablated in silicon using this combination.
Original languageEnglish
Pages (from-to)37-41
JournalJournal of Laser Micro Nanoengineering
Issue number1
Publication statusPublished - 2013
MoE publication typeNot Eligible
Event6th International Congress on Laser Advanced Materials Processing, LAMP 2013 - Niigata, Japan
Duration: 23 Jul 201326 Jul 2013



  • nanosecond laser
  • spatial light modulator
  • computer generated hologram
  • laser marking
  • microstructures

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