Femtosecond laser processing and spatial light modulator

Kimmo Päiväsaari, Martti Silvennoinen, Jarno Kaakkunen, Pasi Vahimaa

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.
Original languageEnglish
Title of host publicationProceedings of SPIE Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 2014
PublisherInternational Society for Optics and Photonics SPIE
Number of pages6
Volume8967
DOIs
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX - San Francisco, CA, United States
Duration: 1 Feb 20146 Feb 2014

Conference

ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX
CountryUnited States
CitySan Francisco, CA
Period1/02/146/02/14

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Keywords

  • Femtosecond phenomena
  • Spatial light modulator
  • Lasers
  • Micromachining
  • Laser Processing
  • Computer generated holography

Cite this

Päiväsaari, K., Silvennoinen, M., Kaakkunen, J., & Vahimaa, P. (2014). Femtosecond laser processing and spatial light modulator. In Proceedings of SPIE Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 2014 (Vol. 8967). [89670F] International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2044459