Abstract
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 2014 |
| Publisher | International Society for Optics and Photonics SPIE |
| Number of pages | 6 |
| Volume | 8967 |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A4 Article in a conference publication |
| Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX - San Francisco, CA, United States Duration: 1 Feb 2014 → 6 Feb 2014 |
Publication series
| Name | |
|---|---|
| Publisher | SPIE, Society of Photo-Optical Instrumentation Engineers |
| Volume | 8967 |
Conference
| Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX |
|---|---|
| Country | United States |
| City | San Francisco, CA |
| Period | 1/02/14 → 6/02/14 |
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Keywords
- Femtosecond phenomena
- Spatial light modulator
- Lasers
- Micromachining
- Laser Processing
- Computer generated holography
Cite this
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Femtosecond laser processing and spatial light modulator. / Päiväsaari, Kimmo; Silvennoinen, Martti; Kaakkunen, Jarno; Vahimaa, Pasi.
Proceedings of SPIE Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 2014. Vol. 8967 International Society for Optics and Photonics SPIE, 2014. 89670F.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Femtosecond laser processing and spatial light modulator
AU - Päiväsaari, Kimmo
AU - Silvennoinen, Martti
AU - Kaakkunen, Jarno
AU - Vahimaa, Pasi
N1 - Project code: 74520
PY - 2014
Y1 - 2014
N2 - The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.
AB - The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.
KW - Femtosecond phenomena
KW - Spatial light modulator
KW - Lasers
KW - Micromachining
KW - Laser Processing
KW - Computer generated holography
U2 - 10.1117/12.2044459
DO - 10.1117/12.2044459
M3 - Conference article in proceedings
VL - 8967
BT - Proceedings of SPIE Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 2014
PB - International Society for Optics and Photonics SPIE
ER -