Abstract
The use of the femtosecond laser enables generation of
small spot sizes and ablation features. Ablation of the
small features usually requires only a small amount of
laser power to be delivered to the ablation spot. When
using only a one beam for the ablation of the small
features this process is bound to be time consuming. The
spatial light modulator (SLM) together with the computer
generated holograms (CGH) can be used for manipulating
and shaping of the laser beam in various applications. In
laser micromachining, when using laser with relatively
high power, the original beam can be divided up to
hundreds beams and still have the energy of the
individual beam above the ablation threshold of the
material. This parallel laser processing enables more
efficient use of the laser power regardless of the
machining task.
Original language | English |
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Title of host publication | Proceedings of SPIE Volume 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX, 2014 |
Publisher | International Society for Optics and Photonics SPIE |
Number of pages | 6 |
Volume | 8967 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A4 Article in a conference publication |
Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX - San Francisco, CA, United States Duration: 1 Feb 2014 → 6 Feb 2014 |
Conference
Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX |
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Country | United States |
City | San Francisco, CA |
Period | 1/02/14 → 6/02/14 |
Keywords
- Femtosecond phenomena
- Spatial light modulator
- Lasers
- Micromachining
- Laser Processing
- Computer generated holography