Femtosecond laser processing and spatial light modulator

Kimmo Päiväsaari, Martti Silvennoinen, Jarno Kaakkunen, Pasi Vahimaa

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.
Original languageEnglish
Title of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
EditorsYoshiki Nakata, Xianfan Xu, Stephan Roth, Beat Neuenschwander
PublisherInternational Society for Optics and Photonics SPIE
Number of pages6
ISBN (Print)978-0-8194-9880-9
Publication statusPublished - 2014
MoE publication typeA4 Article in a conference publication
EventLaser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX - San Francisco, CA, United States
Duration: 1 Feb 20146 Feb 2014

Publication series

SeriesProceedings of SPIE


ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX
Country/TerritoryUnited States
CitySan Francisco, CA


  • Femtosecond phenomena
  • Spatial light modulator
  • Lasers
  • Micromachining
  • Laser Processing
  • Computer generated holography


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