Femtosecond laser processing and spatial light modulator

Kimmo Päiväsaari; Martti Silvennoinen; Jarno Kaakkunen; Pasi Vahimaa

doi:10.1117/12.2044459

Femtosecond laser processing and spatial light modulator

Kimmo Päiväsaari
, Martti Silvennoinen
, Jarno Kaakkunen
, Pasi Vahimaa

VTT Technical Research Centre of Finland

University of Eastern Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Abstract

The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.

Original language	English
Title of host publication	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX
Editors	Yoshiki Nakata, Xianfan Xu, Stephan Roth, Beat Neuenschwander
Publisher	International Society for Optics and Photonics SPIE
Number of pages	6
ISBN (Print)	978-0-8194-9880-9
DOIs	https://doi.org/10.1117/12.2044459
Publication status	Published - 2014
MoE publication type	A4 Article in a conference publication
Event	Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX - San Francisco, CA, United States Duration: 1 Feb 2014 → 6 Feb 2014

Publication series

Series	Proceedings of SPIE
Volume	8967
ISSN	0277-786X

Conference

Conference	Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX
Country/Territory	United States
City	San Francisco, CA
Period	1/02/14 → 6/02/14

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Femtosecond phenomena
Spatial light modulator
Lasers
Micromachining
Laser Processing
Computer generated holography

Access to Document

10.1117/12.2044459

Cite this

Päiväsaari, K., Silvennoinen, M., Kaakkunen, J., & Vahimaa, P. (2014). Femtosecond laser processing and spatial light modulator. In Y. Nakata, X. Xu, S. Roth, & B. Neuenschwander (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX Article 89670F International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.2044459

Päiväsaari, Kimmo ; Silvennoinen, Martti ; Kaakkunen, Jarno et al. / Femtosecond laser processing and spatial light modulator. Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX. editor / Yoshiki Nakata ; Xianfan Xu ; Stephan Roth ; Beat Neuenschwander. International Society for Optics and Photonics SPIE, 2014. (Proceedings of SPIE, Vol. 8967).

@inproceedings{4df56c918bae4df585620c44a5e0d644,

title = "Femtosecond laser processing and spatial light modulator",

abstract = "The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.",

keywords = "Femtosecond phenomena, Spatial light modulator, Lasers, Micromachining, Laser Processing, Computer generated holography",

author = "Kimmo P{\"a}iv{\"a}saari and Martti Silvennoinen and Jarno Kaakkunen and Pasi Vahimaa",

note = "Project code: 74520; Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX ; Conference date: 01-02-2014 Through 06-02-2014",

year = "2014",

doi = "10.1117/12.2044459",

language = "English",

isbn = "978-0-8194-9880-9",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

editor = "Yoshiki Nakata and Xianfan Xu and Stephan Roth and Beat Neuenschwander",

booktitle = "Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX",

address = "United States",

}

Päiväsaari, K, Silvennoinen, M, Kaakkunen, J & Vahimaa, P 2014, Femtosecond laser processing and spatial light modulator. in Y Nakata, X Xu, S Roth & B Neuenschwander (eds), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX., 89670F, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX, San Francisco, CA, United States, 1/02/14. https://doi.org/10.1117/12.2044459

Femtosecond laser processing and spatial light modulator. / Päiväsaari, Kimmo; Silvennoinen, Martti; Kaakkunen, Jarno et al.
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX. ed. / Yoshiki Nakata; Xianfan Xu; Stephan Roth; Beat Neuenschwander. International Society for Optics and Photonics SPIE, 2014. 89670F (Proceedings of SPIE, Vol. 8967).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Femtosecond laser processing and spatial light modulator

AU - Päiväsaari, Kimmo

AU - Silvennoinen, Martti

AU - Kaakkunen, Jarno

AU - Vahimaa, Pasi

N1 - Project code: 74520

PY - 2014

Y1 - 2014

N2 - The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.

AB - The use of the femtosecond laser enables generation of small spot sizes and ablation features. Ablation of the small features usually requires only a small amount of laser power to be delivered to the ablation spot. When using only a one beam for the ablation of the small features this process is bound to be time consuming. The spatial light modulator (SLM) together with the computer generated holograms (CGH) can be used for manipulating and shaping of the laser beam in various applications. In laser micromachining, when using laser with relatively high power, the original beam can be divided up to hundreds beams and still have the energy of the individual beam above the ablation threshold of the material. This parallel laser processing enables more efficient use of the laser power regardless of the machining task.

KW - Femtosecond phenomena

KW - Spatial light modulator

KW - Lasers

KW - Micromachining

KW - Laser Processing

KW - Computer generated holography

U2 - 10.1117/12.2044459

DO - 10.1117/12.2044459

M3 - Conference article in proceedings

SN - 978-0-8194-9880-9

T3 - Proceedings of SPIE

BT - Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX

A2 - Nakata, Yoshiki

A2 - Xu, Xianfan

A2 - Roth, Stephan

A2 - Neuenschwander, Beat

PB - International Society for Optics and Photonics SPIE

T2 - Laser Applications in Microelectronic and Optoelectronic Manufacturing, (LAMOM) XIX

Y2 - 1 February 2014 through 6 February 2014

ER -

Päiväsaari K, Silvennoinen M, Kaakkunen J, Vahimaa P. Femtosecond laser processing and spatial light modulator. In Nakata Y, Xu X, Roth S, Neuenschwander B, editors, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX. International Society for Optics and Photonics SPIE. 2014. 89670F. (Proceedings of SPIE, Vol. 8967). doi: 10.1117/12.2044459

Femtosecond laser processing and spatial light modulator

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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Cite this