Ferroelectric materials and thin film processing for electro-optic modulators

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Abstract

Highly oriented BaTiO3 based thin films have been grown with pulsed laser deposition technique on single crystal MgO (001) substrates.The structural, dielectric and optical properties have been characterized with x-ray diffraction, an atomic-force-microscope, prism coupling and impedance studies.Thin film deposition parameters have been optimized to grow optical quality ferroelectric thin films with controllable crystal orientation and birefringence.The crystal lattice tetragonal distortion was found to be controllable by adjusting the deposition conditions.The waveguide manufacturing process was developed to fabricate active optical waveguides based on BaTiO3 and an effective electro-optic coefficient of 25 pm/V was determined.
Original languageEnglish
Title of host publicationApplied Material Research at VTT
Subtitle of host publicationSymposium on Applied Materials
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages88-97
ISBN (Electronic)951-38-6312-3
ISBN (Print)951-38-6311-5
Publication statusPublished - 2006
MoE publication typeB3 Non-refereed article in conference proceedings
EventInternal Symposium on Applied Materials - Espoo, Finland
Duration: 8 Jun 20068 Jun 2006

Publication series

SeriesVTT Symposium
Number244
ISSN0357-9387

Conference

ConferenceInternal Symposium on Applied Materials
CountryFinland
CityEspoo
Period8/06/068/06/06

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