Ferroelectric materials and thin film processing for electro-optic modulators

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific


    Highly oriented BaTiO3 based thin films have been grown with pulsed laser deposition technique on single crystal MgO (001) substrates.The structural, dielectric and optical properties have been characterized with x-ray diffraction, an atomic-force-microscope, prism coupling and impedance studies.Thin film deposition parameters have been optimized to grow optical quality ferroelectric thin films with controllable crystal orientation and birefringence.The crystal lattice tetragonal distortion was found to be controllable by adjusting the deposition conditions.The waveguide manufacturing process was developed to fabricate active optical waveguides based on BaTiO3 and an effective electro-optic coefficient of 25 pm/V was determined.
    Original languageEnglish
    Title of host publicationApplied Material Research at VTT
    Subtitle of host publicationSymposium on Applied Materials
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    ISBN (Electronic)951-38-6312-3
    ISBN (Print)951-38-6311-5
    Publication statusPublished - 2006
    MoE publication typeB3 Non-refereed article in conference proceedings
    EventInternal Symposium on Applied Materials - Espoo, Finland
    Duration: 8 Jun 20068 Jun 2006

    Publication series

    SeriesVTT Symposium


    ConferenceInternal Symposium on Applied Materials


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