Ferroelectric materials and thin film processing for electro-optic modulators

Jussi Hiltunen; Jarkko Tuominen

Ferroelectric materials and thin film processing for electro-optic modulators

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Abstract

Highly oriented BaTiO3 based thin films have been grown with pulsed laser deposition technique on single crystal MgO (001) substrates.The structural, dielectric and optical properties have been characterized with x-ray diffraction, an atomic-force-microscope, prism coupling and impedance studies.Thin film deposition parameters have been optimized to grow optical quality ferroelectric thin films with controllable crystal orientation and birefringence.The crystal lattice tetragonal distortion was found to be controllable by adjusting the deposition conditions.The waveguide manufacturing process was developed to fabricate active optical waveguides based on BaTiO3 and an effective electro-optic coefficient of 25 pm/V was determined.

Original language	English
Title of host publication	Applied Material Research at VTT
Subtitle of host publication	Symposium on Applied Materials
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Pages	88-97
ISBN (Electronic)	951-38-6312-3
ISBN (Print)	951-38-6311-5
Publication status	Published - 2006
MoE publication type	B3 Non-refereed article in conference proceedings
Event	Internal Symposium on Applied Materials - Espoo, Finland Duration: 8 Jun 2006 → 8 Jun 2006

Publication series

Series	VTT Symposium
Number	244
ISSN	0357-9387

Conference

Conference	Internal Symposium on Applied Materials
Country/Territory	Finland
City	Espoo
Period	8/06/06 → 8/06/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

https://publications.vtt.fi/pdf/symposiums/2006/S244.pdf

Cite this

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title = "Ferroelectric materials and thin film processing for electro-optic modulators",

abstract = "Highly oriented BaTiO3 based thin films have been grown with pulsed laser deposition technique on single crystal MgO (001) substrates.The structural, dielectric and optical properties have been characterized with x-ray diffraction, an atomic-force-microscope, prism coupling and impedance studies.Thin film deposition parameters have been optimized to grow optical quality ferroelectric thin films with controllable crystal orientation and birefringence.The crystal lattice tetragonal distortion was found to be controllable by adjusting the deposition conditions.The waveguide manufacturing process was developed to fabricate active optical waveguides based on BaTiO3 and an effective electro-optic coefficient of 25 pm/V was determined.",

author = "Jussi Hiltunen and Jarkko Tuominen",

year = "2006",

language = "English",

isbn = "951-38-6311-5",

series = "VTT Symposium",

publisher = "VTT Technical Research Centre of Finland",

number = "244",

pages = "88--97",

booktitle = "Applied Material Research at VTT",

address = "Finland",

note = "Internal Symposium on Applied Materials ; Conference date: 08-06-2006 Through 08-06-2006",

}

Hiltunen, J & Tuominen, J 2006, Ferroelectric materials and thin film processing for electro-optic modulators. in Applied Material Research at VTT: Symposium on Applied Materials. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 244, pp. 88-97, Internal Symposium on Applied Materials, Espoo, Finland, 8/06/06. <https://publications.vtt.fi/pdf/symposiums/2006/S244.pdf>

Ferroelectric materials and thin film processing for electro-optic modulators. / Hiltunen, Jussi ; Tuominen, Jarkko.
Applied Material Research at VTT: Symposium on Applied Materials. Espoo: VTT Technical Research Centre of Finland, 2006. p. 88-97 (VTT Symposium; No. 244).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Ferroelectric materials and thin film processing for electro-optic modulators

AU - Hiltunen, Jussi

AU - Tuominen, Jarkko

PY - 2006

Y1 - 2006

N2 - Highly oriented BaTiO3 based thin films have been grown with pulsed laser deposition technique on single crystal MgO (001) substrates.The structural, dielectric and optical properties have been characterized with x-ray diffraction, an atomic-force-microscope, prism coupling and impedance studies.Thin film deposition parameters have been optimized to grow optical quality ferroelectric thin films with controllable crystal orientation and birefringence.The crystal lattice tetragonal distortion was found to be controllable by adjusting the deposition conditions.The waveguide manufacturing process was developed to fabricate active optical waveguides based on BaTiO3 and an effective electro-optic coefficient of 25 pm/V was determined.

AB - Highly oriented BaTiO3 based thin films have been grown with pulsed laser deposition technique on single crystal MgO (001) substrates.The structural, dielectric and optical properties have been characterized with x-ray diffraction, an atomic-force-microscope, prism coupling and impedance studies.Thin film deposition parameters have been optimized to grow optical quality ferroelectric thin films with controllable crystal orientation and birefringence.The crystal lattice tetragonal distortion was found to be controllable by adjusting the deposition conditions.The waveguide manufacturing process was developed to fabricate active optical waveguides based on BaTiO3 and an effective electro-optic coefficient of 25 pm/V was determined.

M3 - Conference article in proceedings

SN - 951-38-6311-5

T3 - VTT Symposium

SP - 88

EP - 97

BT - Applied Material Research at VTT

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - Internal Symposium on Applied Materials

Y2 - 8 June 2006 through 8 June 2006

ER -

Ferroelectric materials and thin film processing for electro-optic modulators

Abstract

Publication series

Conference

UN SDGs

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