Field Stitching using Step and Stamp Imprint Lithography (SSIL)

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Gilbert Lecarpentier

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2006
MoE publication typeNot Eligible
Event5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06 - San Francisco, United States
Duration: 15 Nov 200617 Nov 2006

Conference

Conference5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06
CountryUnited States
CitySan Francisco
Period15/11/0617/11/06

Cite this

Haatainen, T., Majander, P., Mäkelä, T., Ahopelto, J., & Lecarpentier, G. (2006). Field Stitching using Step and Stamp Imprint Lithography (SSIL). Paper presented at 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06, San Francisco, United States.
Haatainen, Tomi ; Majander, Päivi ; Mäkelä, Tapio ; Ahopelto, Jouni ; Lecarpentier, Gilbert. / Field Stitching using Step and Stamp Imprint Lithography (SSIL). Paper presented at 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06, San Francisco, United States.
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title = "Field Stitching using Step and Stamp Imprint Lithography (SSIL)",
author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto and Gilbert Lecarpentier",
note = "CA2: tk601 Project code: 1231; 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06 ; Conference date: 15-11-2006 Through 17-11-2006",
year = "2006",
language = "English",

}

Haatainen, T, Majander, P, Mäkelä, T, Ahopelto, J & Lecarpentier, G 2006, 'Field Stitching using Step and Stamp Imprint Lithography (SSIL)' Paper presented at 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06, San Francisco, United States, 15/11/06 - 17/11/06, .

Field Stitching using Step and Stamp Imprint Lithography (SSIL). / Haatainen, Tomi; Majander, Päivi; Mäkelä, Tapio; Ahopelto, Jouni; Lecarpentier, Gilbert.

2006. Paper presented at 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06, San Francisco, United States.

Research output: Contribution to conferenceConference articleScientificpeer-review

TY - CONF

T1 - Field Stitching using Step and Stamp Imprint Lithography (SSIL)

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

AU - Lecarpentier, Gilbert

N1 - CA2: tk601 Project code: 1231

PY - 2006

Y1 - 2006

M3 - Conference article

ER -

Haatainen T, Majander P, Mäkelä T, Ahopelto J, Lecarpentier G. Field Stitching using Step and Stamp Imprint Lithography (SSIL). 2006. Paper presented at 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06, San Francisco, United States.