Field Stitching using Step and Stamp Imprint Lithography (SSIL)

Tomi Haatainen, Päivi Majander, Tapio Mäkelä, Jouni Ahopelto, Gilbert Lecarpentier

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2006
MoE publication typeNot Eligible
Event5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06 - San Francisco, United States
Duration: 15 Nov 200617 Nov 2006

Conference

Conference5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06
CountryUnited States
CitySan Francisco
Period15/11/0617/11/06

Cite this

Haatainen, T., Majander, P., Mäkelä, T., Ahopelto, J., & Lecarpentier, G. (2006). Field Stitching using Step and Stamp Imprint Lithography (SSIL). Paper presented at 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06, San Francisco, United States.