Field Stitching using Step and Stamp Imprint Lithography (SSIL)

Tomi Haatainen; Päivi Majander; Tapio Mäkelä; Jouni Ahopelto; Gilbert Lecarpentier

Field Stitching using Step and Stamp Imprint Lithography (SSIL)

Tomi Haatainen
, Päivi Majander
, Tapio Mäkelä
, Jouni Ahopelto
, Gilbert Lecarpentier

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2006
MoE publication type	Not Eligible
Event	5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06 - San Francisco, United States Duration: 15 Nov 2006 → 17 Nov 2006

Conference

Conference	5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06
Country/Territory	United States
City	San Francisco
Period	15/11/06 → 17/11/06

Cite this

@conference{9ece7ef06e934c058210e1f7ed39705e,

title = "Field Stitching using Step and Stamp Imprint Lithography (SSIL)",

author = "Tomi Haatainen and P{\"a}ivi Majander and Tapio M{\"a}kel{\"a} and Jouni Ahopelto and Gilbert Lecarpentier",

note = "CA2: tk601 Project code: 1231; 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06 ; Conference date: 15-11-2006 Through 17-11-2006",

year = "2006",

language = "English",

}

TY - CONF

T1 - Field Stitching using Step and Stamp Imprint Lithography (SSIL)

AU - Haatainen, Tomi

AU - Majander, Päivi

AU - Mäkelä, Tapio

AU - Ahopelto, Jouni

AU - Lecarpentier, Gilbert

N1 - CA2: tk601 Project code: 1231

PY - 2006

Y1 - 2006

M3 - Conference article

T2 - 5th International Conference on Nanoimprint and Nanoprint Technology, NNT'06

Y2 - 15 November 2006 through 17 November 2006

ER -