Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2

Karsten Arts, Mikko Utriainen, Riikka L. Puurunen, Wilhelmus M.M. Kessels, Harm C.M. Knoops

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    Surface recombination of plasma radicals is generally considered to limit film conformality during plasma-assisted atomic layer deposition (ALD). Here, we experimentally studied film penetration into high-aspect-ratio structures and demonstrated that it can give direct information on the recombination probability r of plasma radicals on the growth surface. This is shown for recombination of oxygen (O) atoms on SiO2, TiO2, Al2O3, and HfO2 where a strong material dependence has been observed. Using extended plasma exposures, films of SiO2 and TiO2 penetrated extremely deep up to an aspect ratio (AR) of âˆ900, and similar surface recombination probabilities of r = (6 ± 2) × 10-5 and (7 ± 4) × 10-5 were determined for these processes. Growth of Al2O3 and HfO2 was conformal up to depths corresponding to ARs of âˆ80 and âˆ40, with r estimated at (1-10) × 10-3 and (0.1-10) × 10-2, respectively. Such quantitative insight into surface recombination, as provided by our method, is essential for modeling radical-surface interaction and understanding for which materials and conditions conformal film growth is feasible by plasma-assisted ALD. ©

    Original languageEnglish
    Pages (from-to)27030-27035
    Number of pages6
    JournalJournal of Physical Chemistry C
    Volume123
    Issue number44
    DOIs
    Publication statusPublished - 7 Nov 2019
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Atomic layer deposition
    atomic layer epitaxy
    Plasmas
    Atoms
    atoms
    Aspect ratio
    Film growth
    high aspect ratio
    surface reactions
    aspect ratio
    penetration
    TiO2-SiO2
    Oxygen
    oxygen

    Cite this

    Arts, Karsten ; Utriainen, Mikko ; Puurunen, Riikka L. ; Kessels, Wilhelmus M.M. ; Knoops, Harm C.M. / Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2. In: Journal of Physical Chemistry C. 2019 ; Vol. 123, No. 44. pp. 27030-27035.
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    abstract = "Surface recombination of plasma radicals is generally considered to limit film conformality during plasma-assisted atomic layer deposition (ALD). Here, we experimentally studied film penetration into high-aspect-ratio structures and demonstrated that it can give direct information on the recombination probability r of plasma radicals on the growth surface. This is shown for recombination of oxygen (O) atoms on SiO2, TiO2, Al2O3, and HfO2 where a strong material dependence has been observed. Using extended plasma exposures, films of SiO2 and TiO2 penetrated extremely deep up to an aspect ratio (AR) of {\^a}ˆ900, and similar surface recombination probabilities of r = (6 ± 2) × 10-5 and (7 ± 4) × 10-5 were determined for these processes. Growth of Al2O3 and HfO2 was conformal up to depths corresponding to ARs of {\^a}ˆ80 and {\^a}ˆ40, with r estimated at (1-10) × 10-3 and (0.1-10) × 10-2, respectively. Such quantitative insight into surface recombination, as provided by our method, is essential for modeling radical-surface interaction and understanding for which materials and conditions conformal film growth is feasible by plasma-assisted ALD. {\circledC}",
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    Film Conformality and Extracted Recombination Probabilities of O Atoms during Plasma-Assisted Atomic Layer Deposition of SiO2, TiO2, Al2O3, and HfO2. / Arts, Karsten; Utriainen, Mikko; Puurunen, Riikka L.; Kessels, Wilhelmus M.M.; Knoops, Harm C.M.

    In: Journal of Physical Chemistry C, Vol. 123, No. 44, 07.11.2019, p. 27030-27035.

    Research output: Contribution to journalArticleScientificpeer-review

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    AU - Arts, Karsten

    AU - Utriainen, Mikko

    AU - Puurunen, Riikka L.

    AU - Kessels, Wilhelmus M.M.

    AU - Knoops, Harm C.M.

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