Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

U. Danzebrink, L. Koenders, G.B. Picotto, Antti Lassila, S.H. Wang, P. Klapetek

Research output: Contribution to journalArticleScientificpeer-review

Abstract

SUPPLEMENTARY COMPARISON: Measurements have been made at five national metrology institutes (NMIs) in the subject field of dimensional measurement using scanning probe microscopy. Four of the participating NMIs are in Europe, the fifth is in the Asia-Pacific region. Each NMI made measurements of four step height standards and two 1D grating standards. These are typical artefact standards used for dimensional nanometrology. Each participant used a different atomic force microscope to perform the measurements. The report lists the results obtained by the individual participants, as well as an analysis of the results and their uncertainties, based on calculation of the weighted means and En values. The results are in good agreement with one another.
Original languageEnglish
Article number04006
JournalMetrologia
Volume47
Issue numberTechnical Supplement
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

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    Danzebrink, U., Koenders, L., Picotto, G. B., Lassila, A., Wang, S. H., & Klapetek, P. (2010). Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings. Metrologia, 47(Technical Supplement), [04006]. https://doi.org/10.1088/0026-1394/47/1A/04006