Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

U. Danzebrink; L. Koenders; G.B. Picotto; Antti Lassila; S.H. Wang; P. Klapetek

doi:10.1088/0026-1394/47/1A/04006

Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

U. Danzebrink, L. Koenders, G.B. Picotto, Antti Lassila, S.H. Wang, P. Klapetek

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

SUPPLEMENTARY COMPARISON: Measurements have been made at five national metrology institutes (NMIs) in the subject field of dimensional measurement using scanning probe microscopy. Four of the participating NMIs are in Europe, the fifth is in the Asia-Pacific region. Each NMI made measurements of four step height standards and two 1D grating standards. These are typical artefact standards used for dimensional nanometrology. Each participant used a different atomic force microscope to perform the measurements. The report lists the results obtained by the individual participants, as well as an analysis of the results and their uncertainties, based on calculation of the weighted means and E_n values. The results are in good agreement with one another.

Original language	English
Article number	04006
Journal	Metrologia
Volume	47
Issue number	Technical Supplement
DOIs	https://doi.org/10.1088/0026-1394/47/1A/04006
Publication status	Published - 2010
MoE publication type	A1 Journal article-refereed

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abstract = "SUPPLEMENTARY COMPARISON: Measurements have been made at five national metrology institutes (NMIs) in the subject field of dimensional measurement using scanning probe microscopy. Four of the participating NMIs are in Europe, the fifth is in the Asia-Pacific region. Each NMI made measurements of four step height standards and two 1D grating standards. These are typical artefact standards used for dimensional nanometrology. Each participant used a different atomic force microscope to perform the measurements. The report lists the results obtained by the individual participants, as well as an analysis of the results and their uncertainties, based on calculation of the weighted means and En values. The results are in good agreement with one another.",

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T2 - Intercomparison on step height standards and 1D gratings

AU - Danzebrink, U.

AU - Koenders, L.

AU - Picotto, G.B.

AU - Lassila, Antti

AU - Wang, S.H.

AU - Klapetek, P.

PY - 2010

Y1 - 2010

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AB - SUPPLEMENTARY COMPARISON: Measurements have been made at five national metrology institutes (NMIs) in the subject field of dimensional measurement using scanning probe microscopy. Four of the participating NMIs are in Europe, the fifth is in the Asia-Pacific region. Each NMI made measurements of four step height standards and two 1D grating standards. These are typical artefact standards used for dimensional nanometrology. Each participant used a different atomic force microscope to perform the measurements. The report lists the results obtained by the individual participants, as well as an analysis of the results and their uncertainties, based on calculation of the weighted means and En values. The results are in good agreement with one another.

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JO - Metrologia

JF - Metrologia

IS - Technical Supplement

M1 - 04006

ER -

Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

Abstract

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