Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

U. Danzebrink, L. Koenders, G.B. Picotto, Antti Lassila, S.H. Wang, P. Klapetek

Research output: Contribution to journalArticleScientificpeer-review

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Engineering & Materials Science