First Symposium on Atomic Layer Epitaxy

Riitta Paananen (Editor)

Research output: Book/ReportBook (editor)Scientificpeer-review


The proceedings contain the invited papers presented at the First Symposium on Atomic Layer Epitaxy, held on December 13 - 14, 1984 in Espoo. Most of the papers have been devoted to this novel growth method.Related growth techniques, methods of layer characterization and potential applications account for the rest of the content.The contributions represent the growing number of research groups active in this area in Finland.
Original languageEnglish
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Number of pages45
ISBN (Print)951-38-2200-1
Publication statusPublished - 1984
MoE publication typeC2 Edited books
EventFirst Symposium on Atomic Layer Epitaxy - Espoo, Finland
Duration: 13 Dec 198414 Dec 1984

Publication series

SeriesVTT Symposium


  • semiconductors
  • thin films
  • molecular beam epitaxy
  • electroluminescence


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