First Symposium on Atomic Layer Epitaxy

Riitta Paananen

First Symposium on Atomic Layer Epitaxy

Riitta Paananen (Editor)

VTT Technical Research Centre of Finland

Research output: Book/Report › Book (editor) › Scientific › peer-review

Abstract

The proceedings contain the invited papers presented at the First Symposium on Atomic Layer Epitaxy, held on December 13 - 14, 1984 in Espoo. Most of the papers have been devoted to this novel growth method.Related growth techniques, methods of layer characterization and potential applications account for the rest of the content.The contributions represent the growing number of research groups active in this area in Finland.

Original language	English
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Number of pages	45
ISBN (Print)	951-38-2200-1
Publication status	Published - 1984
MoE publication type	C2 Edited books
Event	First Symposium on Atomic Layer Epitaxy - Espoo, Finland Duration: 13 Dec 1984 → 14 Dec 1984

Publication series

Series	VTT Symposium
Number	54
ISSN	0357-9387

Keywords

semiconductors
thin films
molecular beam epitaxy
electroluminescence

Cite this

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title = "First Symposium on Atomic Layer Epitaxy",

abstract = "The proceedings contain the invited papers presented at the First Symposium on Atomic Layer Epitaxy, held on December 13 - 14, 1984 in Espoo. Most of the papers have been devoted to this novel growth method.Related growth techniques, methods of layer characterization and potential applications account for the rest of the content.The contributions represent the growing number of research groups active in this area in Finland.",

keywords = "semiconductors, thin films, molecular beam epitaxy, electroluminescence",

editor = "Riitta Paananen",

year = "1984",

language = "English",

isbn = "951-38-2200-1",

series = "VTT Symposium",

publisher = "VTT Technical Research Centre of Finland",

number = "54",

address = "Finland",

note = "First Symposium on Atomic Layer Epitaxy ; Conference date: 13-12-1984 Through 14-12-1984",

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AB - The proceedings contain the invited papers presented at the First Symposium on Atomic Layer Epitaxy, held on December 13 - 14, 1984 in Espoo. Most of the papers have been devoted to this novel growth method.Related growth techniques, methods of layer characterization and potential applications account for the rest of the content.The contributions represent the growing number of research groups active in this area in Finland.

KW - semiconductors

KW - thin films

KW - molecular beam epitaxy

KW - electroluminescence

M3 - Book (editor)

SN - 951-38-2200-1

T3 - VTT Symposium

BT - First Symposium on Atomic Layer Epitaxy

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - First Symposium on Atomic Layer Epitaxy

Y2 - 13 December 1984 through 14 December 1984

ER -

First Symposium on Atomic Layer Epitaxy

Abstract

Publication series

Keywords

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Cite this