Abstract
The proceedings contain the invited papers presented at the First
Symposium on Atomic Layer Epitaxy, held on December 13 - 14, 1984 in Espoo.
Most of the papers have been devoted to this novel growth method.Related
growth techniques, methods of layer characterization and potential
applications account for the rest of the content.The contributions represent
the growing number of research groups active in this area in Finland.
Original language | English |
---|---|
Place of Publication | Espoo |
Publisher | VTT Technical Research Centre of Finland |
Number of pages | 45 |
ISBN (Print) | 951-38-2200-1 |
Publication status | Published - 1984 |
MoE publication type | C2 Edited books |
Event | First Symposium on Atomic Layer Epitaxy - Espoo, Finland Duration: 13 Dec 1984 → 14 Dec 1984 |
Publication series
Series | VTT Symposium |
---|---|
Number | 54 |
ISSN | 0357-9387 |
Keywords
- semiconductors
- thin films
- molecular beam epitaxy
- electroluminescence