Flexible stamp for nanoimprint lithography

T. Nielsen, R.H. Pedersen, O. Hansen, Tomi Haatainen, Antti Tolkki, Jouni Ahopelto, A. Kristensen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

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    Keyphrases

    Engineering

    Material Science