Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition

Kai Kolari (Corresponding Author), Tahvo Havia, Ingmar Stuns, K Hjort

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems
Original languageEnglish
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume24
Issue number8
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Fingerprint

Silicon
Paraffin
Paraffins
Phase transitions
Membranes
Nanofluidics
Paraffin waxes
Flow control
Microfluidics
Adhesives
Oils
Flow rate
Fabrication
Glass
Composite materials

Keywords

  • fluid dynamics
  • paraffin
  • wafer bonding
  • microfluidic systems

Cite this

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title = "Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition",
abstract = "Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems",
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Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition. / Kolari, Kai (Corresponding Author); Havia, Tahvo; Stuns, Ingmar; Hjort, K.

In: Journal of Micromechanics and Microengineering, Vol. 24, No. 8, 2014.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition

AU - Kolari, Kai

AU - Havia, Tahvo

AU - Stuns, Ingmar

AU - Hjort, K

PY - 2014

Y1 - 2014

N2 - Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems

AB - Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems

KW - fluid dynamics

KW - paraffin

KW - wafer bonding

KW - microfluidic systems

U2 - 10.1088/0960-1317/24/8/084003

DO - 10.1088/0960-1317/24/8/084003

M3 - Article

VL - 24

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

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