Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition

Kai Kolari (Corresponding Author), Tahvo Havia, Ingmar Stuns, K Hjort

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)

    Abstract

    Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems
    Original languageEnglish
    Number of pages6
    JournalJournal of Micromechanics and Microengineering
    Volume24
    Issue number8
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Silicon
    Paraffin
    Paraffins
    Phase transitions
    Membranes
    Nanofluidics
    Paraffin waxes
    Flow control
    Microfluidics
    Adhesives
    Oils
    Flow rate
    Fabrication
    Glass
    Composite materials

    Keywords

    • fluid dynamics
    • paraffin
    • wafer bonding
    • microfluidic systems

    Cite this

    @article{8f12608c73fd4dfaa0d8297c39880ca5,
    title = "Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition",
    abstract = "Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems",
    keywords = "fluid dynamics, paraffin, wafer bonding, microfluidic systems",
    author = "Kai Kolari and Tahvo Havia and Ingmar Stuns and K Hjort",
    year = "2014",
    doi = "10.1088/0960-1317/24/8/084003",
    language = "English",
    volume = "24",
    journal = "Journal of Micromechanics and Microengineering",
    issn = "0960-1317",
    publisher = "Institute of Physics IOP",
    number = "8",

    }

    Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition. / Kolari, Kai (Corresponding Author); Havia, Tahvo; Stuns, Ingmar; Hjort, K.

    In: Journal of Micromechanics and Microengineering, Vol. 24, No. 8, 2014.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Flow restrictor silicon membrane microvalve actuated by optically controlled paraffin phase transition

    AU - Kolari, Kai

    AU - Havia, Tahvo

    AU - Stuns, Ingmar

    AU - Hjort, K

    PY - 2014

    Y1 - 2014

    N2 - Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems

    AB - Restrictor valves allow proportional control of fluid flow but are rarely integrated in microfluidic systems. In this study, an optically actuated silicon membrane restrictor microvalve is demonstrated. Its actuation is based on the phase transition of paraffin, using a paraffin wax mixed with a suitable concentration of optically absorbing nanographite particles. Backing up the membrane with oil (the melted paraffin) allows for a compliant yet strong contact to the valve seat, which enables handling of high pressures. At flow rates up to 30 µL min-1 and at a pressure of 2 bars, the valve can successfully be closed and control the flow level by restriction. The use of this paraffin composite as an adhesive layer sandwiched between the silicon valve and glass eases fabrication. This type of restrictor valve is best suited for high pressure, low volume flow silicon-based nanofluidic systems

    KW - fluid dynamics

    KW - paraffin

    KW - wafer bonding

    KW - microfluidic systems

    U2 - 10.1088/0960-1317/24/8/084003

    DO - 10.1088/0960-1317/24/8/084003

    M3 - Article

    VL - 24

    JO - Journal of Micromechanics and Microengineering

    JF - Journal of Micromechanics and Microengineering

    SN - 0960-1317

    IS - 8

    ER -