Abstract
Restrictor valves allow proportional control of fluid
flow but are rarely integrated in microfluidic systems.
In this study, an optically actuated silicon membrane
restrictor microvalve is demonstrated. Its actuation is
based on the phase transition of paraffin, using a
paraffin wax mixed with a suitable concentration of
optically absorbing nanographite particles. Backing up
the membrane with oil (the melted paraffin) allows for a
compliant yet strong contact to the valve seat, which
enables handling of high pressures. At flow rates up to
30 µL min-1 and at a pressure of 2 bars, the valve can
successfully be closed and control the flow level by
restriction. The use of this paraffin composite as an
adhesive layer sandwiched between the silicon valve and
glass eases fabrication. This type of restrictor valve is
best suited for high pressure, low volume flow
silicon-based nanofluidic systems
Original language | English |
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Number of pages | 6 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 24 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Keywords
- fluid dynamics
- paraffin
- wafer bonding
- microfluidic systems